公开(公告)号：US09759562B2

公开(公告)日：2017-09-12

申请号：US14425153

申请日：2013-09-04

申请人： Julius Georgiou ,  Charalambos Michael Andreou

发明人： Julius Georgiou ,  Charalambos Michael Andreou

IPC分类号： A61B5/00 ,  G01C19/14 ,  G01P15/00 ,  G01P15/03 ,  A61N1/36 ,  G01P3/26 ,  G01P15/08 ,  G01P15/14 ,  A61B5/11

CPC分类号： G01C19/14 ,  A61B5/1121 ,  A61B5/4023 ,  A61B5/6847 ,  A61N1/36036 ,  G01P3/26 ,  G01P15/006 ,  G01P15/038 ,  G01P15/0888 ,  G01P15/14

摘要： A hybrid MEMS microfluidic gyroscope is disclosed. The hybrid MEMS microfluidic gyroscope may include a micro-machined base enclosure having a top fluid enclosure, a fluid sensing enclosure and a bottom fluid enclosure. The hybrid MEMS microfluidic gyroscope may include a plurality of cantilevers disposed within the bottom semi-circular portion of the micro-machined base enclosure or a single membrane disposed within the bottom semi-circular portion of the micro-machined base enclosure.

公开(公告)号：US10563982B2

公开(公告)日：2020-02-18

申请号：US15688052

申请日：2017-08-28

申请人： Julius Georgiou ,  Charalambos Michael Andreou

发明人： Julius Georgiou ,  Charalambos Michael Andreou

IPC分类号： A61B5/00 ,  G01C19/14 ,  A61N1/36 ,  G01P15/00 ,  G01P15/03 ,  G01P3/26 ,  G01P15/08 ,  G01P15/14 ,  A61B5/11

摘要： A hybrid MEMS microfluidic gyroscope is disclosed. The hybrid MEMS microfluidic gyroscope may include a micro-machined base enclosure having a top fluid enclosure, a fluid sensing enclosure and a bottom fluid enclosure. The hybrid MEMS microfluidic gyroscope may include a plurality of cantilevers disposed within the bottom semi-circular portion of the micro-machined base enclosure or a single membrane disposed within the bottom semi-circular portion of the micro-machined base enclosure.