METHOD FOR MANUFACTURING A LENS
    2.
    发明申请
    METHOD FOR MANUFACTURING A LENS 审中-公开
    制造镜头的方法

    公开(公告)号:US20100178614A1

    公开(公告)日:2010-07-15

    申请号:US12064452

    申请日:2005-08-31

    IPC分类号: G03F7/20

    摘要: In the present invention a mask (21) with a concentric pattern (a,b,c,d) is fabricated and aligned on a substrate (130) coated with a photoresist (131) and is then light-exposed. The light-exposed substrate is developed to obtain a concentric pattern of the photoresist in the form of tori. Then, a reflow process is performed for the developed substrate to allow the photoresist in the form of tori to be curved. A stamper in which the concentric pattern of the photoresist in thr form of tori is engraved in a depressed fashion is fabricated. Thereafter, by using the stamper as a mold, a lens and a lens array with the concentric pattern are formed.

    摘要翻译: 在本发明中,制造具有同心图案(a,b,c,d)的掩模(21)并在涂覆有光致抗蚀剂(131)的基板(130)上对准,然后曝光。 曝光的基底被显影以获得tori形式的光致抗蚀剂的同心图案。 然后,对显影的基板进行回流处理,以允许tori形式的光刻胶弯曲。 制造以凹陷方式雕刻以tori形式的光致抗蚀剂的同心图案的压模。 此后,通过使用压模作为模具,形成具有同心图案的透镜和透镜阵列。