公开(公告)号：US06186509B1

公开(公告)日：2001-02-13

申请号：US09316067

申请日：1999-05-21

申请人： Masato Wada ,  Junji Omiya

发明人： Masato Wada ,  Junji Omiya

IPC分类号： F16L3904

CPC分类号： F16L27/087 ,  F16J15/002 ,  F16J15/3484 ,  F16L39/04

摘要： A space between a housing and a rotator is hermetically sealed with a double-mechanical seal. A pair of rotary seal rings are sandwiched between a pair of stationary seal rings while sandwiching therebetween a stopper ring for inhibition of relative rotation between the rotary seal rings and the rotator. A spring is interposed in a space between the stopper and each of the rotary seal rings for pressing each rotary seal ring against the corresponding stationary seal ring.

摘要翻译： 壳体和旋转体之间的空间用双重机械密封密封。 一对旋转密封环夹在一对固定密封环之间，同时夹在其间用于阻止旋转密封环和旋转体之间的相对旋转的止动环。 在止动件和每个旋转密封环之间的空间中插入弹簧，用于将每个旋转密封环压靠在相应的固定密封环上。

公开(公告)号：US06234815B1

公开(公告)日：2001-05-22

申请号：US09331413

申请日：1999-06-21

申请人： Junji Omiya ,  Masato Wada

发明人： Junji Omiya ,  Masato Wada

IPC分类号： H01R460

CPC分类号： F16L27/087 ,  B24B37/04 ,  B24B41/04 ,  B24B55/02

摘要： A rotary joint for fluids that provides a completely sealed path for the flow of polishing solution and which permits the supply of electricity to a polished surface detector. The rotary joint of the present invention is essentially made up of a joint block (1) and a rotator assembly (2). To the rotator assembly (2) rotatably held in the joint block (1) is attached a polishing pad shaft (104). Between the joint block (1) and the rotator assembly (2) is formed a seal space closed by a pair of seal units (5, 5), each comprising sealing rings (51, 52) which rotate in relation to each other. A fluid passage (7) continuous via a seal space (50) and running through the joint block (1) and the rotator assembly (2) is formed, and a wiring conduit running from an electric source unit (3) to the polished surface detector on the polishing pad (104) is also formed. The wiring conduit comprises a rotary connector unit (4) made up of a casing (40) and a first connector (41) supported by the rotator assembly (2) and a second connector (42) held by the joint block (1) with the two connectors (41, 42) electrically connected to each other and relatively rotatable, electric wiring (42a) running from the power unit (3) to the second connector (42), and electric wiring (41a) running from the first connector (41) to the polished surface detector (110) through a wiring conduit (24) formed in the rotator assembly (2).

摘要翻译： 用于流体的旋转接头，其为抛光溶液的流动提供完全密封的路径，并允许向抛光表面检测器供电。 本发明的旋转接头主要由接头块（1）和转子组件（2）构成。 可旋转地保持在接头块（1）中的旋转体组件（2）安装有抛光垫轴（104）。 在关节块（1）和旋转体组件（2）之间形成有由一对密封单元（5,5）封闭的密封空间，每个密封单元包括相对于彼此旋转的密封环（51,52）。 形成了经由密封空间（50）连续通过接头块（1）和转子组件（2）的流体通道（7），以及从电源单元（3）延伸到抛光表面 还形成了抛光垫（104）上的检测器。 接线导管包括由壳体（40）和由转子组件（2）支撑的第一连接器（41）和由接头块（1）保持的第二连接器（42）构成的旋转连接器单元（4） 从电力单元（3）到第二连接器（42）相互电连接并相对旋转的电气配线（42a）的两个连接器（41,42）和从第一连接器（ 41）通过形成在转子组件（2）中的布线导管（24）到抛光表面检测器（110）。

公开(公告)号：US06508472B2

公开(公告)日：2003-01-21

申请号：US09884707

申请日：2001-06-19

申请人： Junji Omiya ,  Jotaro Inoue ,  Osamu Suzuki

发明人： Junji Omiya ,  Jotaro Inoue ,  Osamu Suzuki

IPC分类号： F16J1554

CPC分类号： F16L27/087 ,  F16L39/04

摘要： A multi-channel rotary joint with which a plurality of fluids of the same or different types can be made to flow as desired, including first connecting spaces sealed by mechanical seals and second connecting spaces sealed by mechanical seals and by elastic seals, such connecting spaces being between a joint housing and a rotator. A series of fluid passages that pass through the connecting spaces are also formed in the joint housing and the rotator. The mechanical seals are end-contact type seals and comprise balanced seals with a balance ratio &kgr; such that 0≦&kgr;≦1. Each elastic seal has a U-shaped cross section and is engaged and fixed to one of the opposing peripheral surfaces in a state in which an annular groove between inner and outer peripheral lips opens into the space with the higher pressure out of the second connecting space and its adjacent space.

摘要翻译： 可以根据需要使多个相同或不同类型的流体流动的多通道旋转接头，包括通过机械密封密封的第一连接空间和通过机械密封件密封的第二连接空间和通过弹性密封件的连接空间 在接头壳体和转子之间。 通过连接空间的一系列流体通道也形成在接头壳体和转子中。 机械密封件是端接式密封件，并且包括平衡密封件，其平衡比kappa使得0≤kappa<= 1。 每个弹性密封件都具有U形横截面，并且在内周和外周唇部之间的环形凹槽通过第二连接空间中的较高压力打开到空间中的状态下接合并固定到相对的外周表面之一 及其相邻空间。

公开(公告)号：US06485062B2

公开(公告)日：2002-11-26

申请号：US09898847

申请日：2001-07-03

申请人： Junji Omiya ,  Nobuhito Hirakawa ,  Isao Tanaka ,  Yusuke Kamon

发明人： Junji Omiya ,  Nobuhito Hirakawa ,  Isao Tanaka ,  Yusuke Kamon

IPC分类号： F16L3904

CPC分类号： F16L39/04 ,  F16L27/087

摘要： A multi-channel rotary joint comprising-elastic seal rings each having an annular groove that are used to form a low-pressure channel space and a high-pressure channel space between the opposing peripheral surfaces of a joint housing and a rotator that rotates inside the joint housing. Seal rings that seal the low-pressure channel space which forms part of a vacuum suction route are engaged with and supported by one of the opposing peripheral surfaces such that annular grooves are disposed symmetrically and opening into spaces adjacent to the low-pressure channel space. The seal rings that seal the high-pressure channel space which forms part of a pressurized fluid supply route are engaged with and supported by one of the opposing peripheral surfaces such that the annular grooves are disposed symmetrically and opening into this high-pressure channel space.

摘要翻译： 一种多通道旋转接头，包括弹性密封环，每个环形槽都用于形成低压通道空间和在接头壳体的相对周向表面之间的高压通道空间和在内部旋转的转子 联合住房。 密封形成真空抽吸路径的一部分的低压通道空间的密封环与相对的周向表面中的一个接合并由其支撑，使得环形槽对称地设置并且开口到与低压通道空间相邻的空间。 密封形成加压流体供给路径的一部分的高压通道空间的密封环与相对的周向表面中的一个接合并由其支撑，使得环形槽对称地设置并且通向该高压通道空间。