摘要:
A working fluid injection apparatus has an upper chamber that stores a working fluid and a lower chamber that removably receives a bearing unit having a housing and a shaft that is inserted in the housing to form between the shaft and the housing a gap into which the working fluid is to be injected. A partition divides the upper chamber and the lower chamber into top and bottom parts, respectively. A first exhaust system brings the inside of the upper chamber to a decompressed state. A second exhaust system brings the inside of the lower chamber to a decompressed state. A valve unit opens and closes an internal cavity of the lower chamber relative to an external environment. A tapered hole is formed in the partition and communicates the upper and lower chambers to one another. A tapered shaft is inserted into the tapered hole from the upper chamber. A shaft drive unit moves the tapered shaft in the axial direction in the tapered hole.
摘要:
Working fluid can be prevented from leaking into a vacuum chamber during processes other than a process for injecting working fluid, using a simple construction, and an appropriate amount of working fluid can be injected into an object that is to receive the injection such as a bearing unit. There is provided a working fluid injection apparatus comprising: an upper chamber 16 that stores a working fluid 2; a lower chamber 17 that houses so that it can be inserted and removed, an object that is to receive the injection 6 and that has a gap into which the working fluid 2 is injected; a partition 15 that divides these chambers into top and bottom parts; a first exhaust system 18, 19 that makes the upper chamber 16 a decompressed state; a second exhaust system 19, 20 that makes the lower chamber 17 a decompressed state; a valve unit 22 that opens and closes an internal cavity of the lower chamber 17 relative to an external environment; a tapered hole 23 which is formed in the partition 15, and which communicates between the two chambers 16, 17; a tapered shaft 24 which is inserted into the tapered hole 23 from the upper chamber 16; and a shaft drive unit 25 that moves the tapered shaft 24 in the tapered hole 23 in the axial direction.
摘要:
A core slider mount apparatus and method wherein: a core slider picked up from a core slider container is positioned while clamped in X- and Y-axis directions by first positioning catches of a core slider positioner and second positioning catches of a core mount chuck; a positioning error between an adhering portion of a work and the core slider is corrected based on position information of the work set on a work table; and the core slider is thereafter mounted on the adhering portion of the work.