公开(公告)号：US20140284188A1

公开(公告)日：2014-09-25

申请号：US13966175

申请日：2013-08-13

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroaki YAMAZAKI ,  Haruka KUBO

IPC: B81B3/00 ,  B81C1/00 ,  H01H59/00

CPC classification number: B81B3/0086 ,  B81B2201/016 ,  H01G5/18 ,  H01H59/0009

Abstract: According to one embodiment, a MEMS device comprises a first electrode provided on a support substrate, a second electrode opposed to the first electrode and movable in the direction it is opposed to the first electrode, and beam parts, each connected to those sides of the second electrode, which oppose to each other, and each supporting the second electrode. The second electrode has a slit extending parallel to the sides to which the beam parts are connected and opening at both the front and the back. Further, the second electrode has at least one bridge part extending over the slit, crossing the slit and made of a material different from that of the second electrode.

Abstract translation: 根据一个实施例，MEMS器件包括设置在支撑衬底上的第一电极，与第一电极相对并且可在第一电极与第一电极相对的方向上移动的第二电极，以及每个连接到第一电极的那些侧的光束部分 第二电极彼此相对，并且每个支撑第二电极。 第二电极具有平行于侧面延伸的狭缝，梁部分连接到侧面并且在前后两者都开口。 此外，第二电极具有至少一个在狭缝上延伸的桥接部分，该桥部分与狭缝交叉并且由不同于第二电极的材料制成。

公开(公告)号：US20150266059A1

公开(公告)日：2015-09-24

申请号：US14643350

申请日：2015-03-10

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Haruka KUBO ,  Jun Morimoto

IPC: B06B1/06

CPC classification number: B06B1/0622 ,  A61B8/4483 ,  B06B1/0685

Abstract: According to an embodiment, an ultrasonic probe includes a backing plate, a piezoelectric element, and a protective layer. The piezoelectric element has a piezoelectric vibrator. The piezoelectric element is provided on the backing plate. The protective layer is provided on the surface of an end of the piezoelectric element on the side of the backing plate. Compressive stress is applied to the inside of the protective layer, and the transmission rate of sound inside the protective layer is a predetermined rate.

Abstract translation: 根据实施例，超声波探头包括背板，压电元件和保护层。 压电元件具有压电振动器。 压电元件设置在背板上。 保护层设置在压电元件的背板一侧的表面上。 对保护层的内部施加压缩应力，保护层内的声音传输速度为规定的速度。