公开(公告)号：US20130033123A1

公开(公告)日：2013-02-07

申请号：US13645796

申请日：2012-10-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Yoshiaki KUBOTA ,  Toru SHIKAYAMA ,  Yoichiro DAN ,  Toshiyuki KONO ,  Akihito TOYODA

IPC: H02K41/02

CPC classification number: G03F7/70758

Abstract: In this θZ drive apparatus, at least three coil portions are arranged to be capable of driving a stage in a direction Z, a direction θx which is a rotation direction employing a direction X in a horizontal plane as a center line of rotation, and a direction θy which is a rotation direction employing a direction Y in the horizontal plane orthogonal to the direction X as a center line of rotation.

Abstract translation: 在该驱动装置中，至少三个线圈部分被布置成能够沿Z方向驱动舞台; x是以水平面中的方向X作为中心线的旋转方向的x 旋转方向和y方向，y是在与X方向垂直的水平面中的方向Y作为旋转中心线的旋转方向。