THETA Z DRIVE APPARATUS AND STAGE APPARATUS
    1.
    发明申请
    THETA Z DRIVE APPARATUS AND STAGE APPARATUS 审中-公开
    THETA Z驱动装置和舞台装置

    公开(公告)号:US20130033123A1

    公开(公告)日:2013-02-07

    申请号:US13645796

    申请日:2012-10-05

    CPC classification number: G03F7/70758

    Abstract: In this θZ drive apparatus, at least three coil portions are arranged to be capable of driving a stage in a direction Z, a direction θx which is a rotation direction employing a direction X in a horizontal plane as a center line of rotation, and a direction θy which is a rotation direction employing a direction Y in the horizontal plane orthogonal to the direction X as a center line of rotation.

    Abstract translation: 在该驱动装置中,至少三个线圈部分被布置成能够沿Z方向驱动舞台; x是以水平面中的方向X作为中心线的旋转方向的x 旋转方向和y方向,y是在与X方向垂直的水平面中的方向Y作为旋转中心线的旋转方向。

    END EFFECTOR AND ROBOT
    3.
    发明申请
    END EFFECTOR AND ROBOT 审中-公开
    终端效应器和机器人

    公开(公告)号:US20140125080A1

    公开(公告)日:2014-05-08

    申请号:US14148732

    申请日:2014-01-07

    Abstract: An end effector includes a holding unit that holds a screw member to be rotatable around the axis line of the screw member, and a rotary unit that is provided on the axis line, moves linearly along the axis line in a condition of being in contact with the head portion of the screw member held by the holding unit, and rotates the screw member around the axis line by rotation accompanying the linear motion.

    Abstract translation: 端部执行器包括保持单元,该保持单元保持可围绕螺钉构件的轴线旋转的螺钉构件,并且设置在轴线上的旋转单元在与轴线接触的状态下沿着轴线线性移动 螺钉构件的头部由保持单元保持,并且通过伴随线性运动的旋转使螺纹构件绕轴线旋转。

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