公开(公告)号：US20240109200A1

公开(公告)日：2024-04-04

申请号：US18371784

申请日：2023-09-22

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Koji NAGAFUCHI ,  Keisuke HIGASHI ,  Takashi MINAMI

IPC: B25J11/00 ,  B25J9/16

CPC classification number: B25J11/0095 ,  B25J9/1687 ,  B25J9/044

Abstract: A transfer system includes a robot that loads and unloads a substrate to and from a cassette that accommodates a plurality of substrates in multiple stages; and a controller configured to control an operation of the robot. The robot includes: a hand that transfers the substrate, a horizontal movement mechanism that moves the hand in a width direction of the cassette in a front side of the cassette, and a lift mechanism that moves up and down the hand in the front side of the cassette. The hand includes a reflective sensor on a distal end side thereof facing the cassette to detect an object in the cassette. The controller operates the horizontal movement mechanism causing the reflective sensor to perform a horizontal scanning such that the reflective sensor facing the substrate scans in the width direction of the substrate accommodated in the cassette.