公开(公告)号：US20240383157A1

公开(公告)日：2024-11-21

申请号：US18647509

申请日：2024-04-26

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Koji NAGAFUCHI ,  Makoto TARUNO ,  Hiroki SANEMASA ,  Takashi MINAMI

IPC: B25J15/06 ,  B25J11/00 ,  B25J13/08 ,  B25J15/00

Abstract: A substrate transfer robot includes: a hand that supports a substrate; and an arm that operates the hand. The hand includes an adsorption holder that holds a back surface of the substrate by adsorption, and is stretchable to lower a height position of an upper end thereof, a friction holder that holds the back surface by friction in a state where the adsorption holder supporting the substrate contracts, and a non-contact holder that holds the back surface in a non-contact manner, in a state where the adsorption holder and the friction holder hold the back surface.

公开(公告)号：US20240109200A1

公开(公告)日：2024-04-04

申请号：US18371784

申请日：2023-09-22

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Koji NAGAFUCHI ,  Keisuke HIGASHI ,  Takashi MINAMI

IPC: B25J11/00 ,  B25J9/16

CPC classification number: B25J11/0095 ,  B25J9/1687 ,  B25J9/044

Abstract: A transfer system includes a robot that loads and unloads a substrate to and from a cassette that accommodates a plurality of substrates in multiple stages; and a controller configured to control an operation of the robot. The robot includes: a hand that transfers the substrate, a horizontal movement mechanism that moves the hand in a width direction of the cassette in a front side of the cassette, and a lift mechanism that moves up and down the hand in the front side of the cassette. The hand includes a reflective sensor on a distal end side thereof facing the cassette to detect an object in the cassette. The controller operates the horizontal movement mechanism causing the reflective sensor to perform a horizontal scanning such that the reflective sensor facing the substrate scans in the width direction of the substrate accommodated in the cassette.

公开(公告)号：US20130178979A1

公开(公告)日：2013-07-11

申请号：US13661039

申请日：2012-10-26

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Yoshiki KIMURA ,  Takashi MINAMI

IPC: B25J13/08

CPC classification number: H01L21/67742 ,  H01L21/67766 ,  H01L21/68707

Abstract: A transfer system according to an embodiment includes a plurality of robot hands, a storage unit, and an instructing part. The robot hands are operable to hold a thin sheet-like workpiece. The storage unit stores therein speed information that represents a temperature of the workpiece associated with a specified speed of a robot hand that holds the workpiece. The instructing part extracts the specified speed for each robot hand from the speed information and instructs to move all of the robot hands at or lower than a representative speed determined based on a set of extracted specified speed data.

Abstract translation: 根据实施例的传送系统包括多个机器人手，存储单元和指令部分。 机器人手可操作以保持薄的片状工件。 存储单元存储表示与保持工件的机器人手的指定速度相关联的工件的温度的速度信息。 指示部从速度信息中提取每个机器人手的指定速度，并且指示使所有机器人手等于或低于基于提取的指定速度数据的集合确定的代表速度。

公开(公告)号：US20240312821A1

公开(公告)日：2024-09-19

申请号：US18670921

申请日：2024-05-22

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Jung-ho YUN ,  Yonggu KANG ,  Mid Uem RYU ,  Hiroki SANEMASA ,  Takashi MINAMI ,  Daisuke HIGASHITARUMIZU

IPC: H01L21/68 ,  B25J9/16 ,  B65G47/90 ,  H01L21/687

CPC classification number: H01L21/681 ,  B25J9/163 ,  B65G47/905 ,  H01L21/68707

Abstract: An automatic teaching apparatus for semiconductor manufacturing equipment includes: an equipment front end module (EFEM); one or more load ports provided along an edge of one side of the EFEM to be connected to an inside of the EFEM; a transfer robot disposed in the inside of the EFEM and configured to transfer a wafer to the one or more load ports by an end effector to process the wafer, and a load port teaching unit configured to detect a fixed position of the end effector in a state of unloading the wafer such that the wafer is placed in the fixed position within the load port.

公开(公告)号：US20240186175A1

公开(公告)日：2024-06-06

申请号：US18510394

申请日：2023-11-15

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Takashi MINAMI ,  Yoshiki KIMURA ,  Hiroki SANEMASA

IPC: H01L21/687 ,  B25J11/00 ,  B25J19/02 ,  H01L21/68

CPC classification number: H01L21/68707 ,  B25J11/0095 ,  B25J19/021 ,  H01L21/681

Abstract: A substrate transfer apparatus includes a hand that transfers a substrate from a cassette that accommodates substrates in multiple stages in a vertical direction; a movement mechanism that moves the hand; a controller that controls the movement mechanism; and a first detection unit that detects the substrate. The controller includes an offset amount change unit that changes an offset amount by which the hand is moved up and down from a substrate support height of the cassette when the hand loads and unloads the substrate with respect to the cassette, according to a thickness or a deflection amount of the substrate detected by the first detection unit.

公开(公告)号：US20160055425A1

公开(公告)日：2016-02-25

申请号：US14830687

申请日：2015-08-19

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Takashi MINAMI

IPC: G06N99/00

CPC classification number: G05B19/425 ,  G05B2219/39136 ,  G05B2219/40307 ,  G05B2219/40387 ,  Y10S901/03 ,  Y10S901/14

Abstract: A robot system includes a robot including a robot arm, and a first hand and a second hand which are connected to the robot arm and which are provided to independently rotate about an axis on the robot arm; and a controller configured to control an operation of the robot. When the robot arm and the first hand are operated so that the first hand reaches a predetermined target position, teaching values for the first hand in the target position is generated. When the first hand and the second hand are rotated based on the teaching values for the first hand, a relative error in rotation amount around the axis between the first hand and the second hand is acquired and stored in a memory. Teaching values for the second hand is generated from the teaching values for the first hand based on the acquired relative error.

Abstract translation: 机器人系统包括机器人，其包括机器人臂，以及连接到机器人手臂并且被设置成围绕机器人手臂上的轴独立地旋转的第一只手和第二只手; 以及控制器，被配置为控制所述机器人的操作。 当机器人手臂和第一只手操作使得第一只手达到预定目标位置时，产生目标位置中第一只手的教导值。 当第一只手和第二只手基于第一只手的教导值旋转时，获取在第一只手和第二只手之间的轴周围的旋转量的相对误差并将其存储在存储器中。 基于所获得的相对误差，从第一手教学值产生秒针的教学值。

公开(公告)号：US20150174763A1

公开(公告)日：2015-06-25

申请号：US14555581

申请日：2014-11-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Yoshiki KIMURA ,  Takashi MINAMI

IPC: B25J9/16 ,  G01D5/34

CPC classification number: H01L21/681 ,  H01L21/67259 ,  Y10S901/30 ,  Y10S901/47

Abstract: A detection system includes: a rotator that causes a mounting base where a circular substrate is to be mounted to rotate around a rotation axis; a detector that detects presence or absence of an outer peripheral portion of the rotating substrate at a plurality of respective detecting positions having different distances from the rotation axis; and a determiner that determines an eccentric state of the substrate based on detection information, the detection information being a combination of a phase of the mounting base when the presence or absence of the outer peripheral portion is switched and the detecting positions.

Abstract translation: 检测系统包括：旋转体，其使得安装基座，其中圆形基板将被安装成围绕旋转轴线旋转; 检测器，其在与所述旋转轴线不同的距离的多个检测位置处检测所述旋转基板的外周部的存在或不存在; 以及确定器，其基于检测信息确定所述基板的偏心状态，所述检测信息是当切换所述外周部分的存在或不存在时所述安装基座的相位与所述检测位置的组合。

公开(公告)号：US20130218337A1

公开(公告)日：2013-08-22

申请号：US13765754

申请日：2013-02-13

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Takashi MINAMI ,  Shinichi KATSUDA

IPC: B25J9/00

CPC classification number: B25J9/0084 ,  B25J9/1682 ,  G05B2219/45031 ,  G05B2219/50036 ,  H01L21/67766 ,  H01L21/681 ,  Y10S414/137

Abstract: A transfer system includes a substrate positioning device, robots having a first robot and a second robot; and robot control devices, the robot control devices including a first robot control device to which the first robot and the substrate positioning device are connected and a second robot control device to which the second robot is connected. The first robot control device includes an acquiring unit configured to acquire, from the substrate positioning device, at least an absolute deviation amount between the rotation center of the mounting table and a center position of the substrate positioned, and a transmitting unit configured to transmit correction information relying on the absolute deviation amount acquired by the acquiring unit, to the second robot control device to which the second robot is connected.

Abstract translation: 传送系统包括基板定位装置，具有第一机器人和第二机器人的机器人; 以及机器人控制装置，所述机器人控制装置包括与所述第一机器人和所述基板定位装置连接的第一机器人控制装置和所述第二机器人连接的第二机器人控制装置。 第一机器人控制装置包括获取单元，被配置为从基板定位装置获取安装台的旋转中心与定位的基板的中心位置之间的绝对偏差量和发送单元， 依赖于由获取单元获取的绝对偏差量的信息提供给连接有第二机器人的第二机器人控制装置。

公开(公告)号：US20240278433A1

公开(公告)日：2024-08-22

申请号：US18440146

申请日：2024-02-13

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Koji NAGAFUCHI ,  Hiroki SANEMASA ,  Takashi MINAMI

IPC: B25J9/16

CPC classification number: B25J9/1692

Abstract: A robot system includes a robot that supports and transfers a substrate W using a hand, a target capable of being placed instead of the substrate, a sensor provided on the hand to detect the target in a non-contact manner while facing the target a first detector that detects a position of the target in the first direction based on a detection result of the sensor facing the target long the first direction and a position of the sensor, and a second detector that controls the robot to move the sensor along a second direction perpendicular to the first direction, and detects a position of the target in the second direction based on a change in the detection result of the sensor due to movement along the second direction and the position of the sensor.

公开(公告)号：US20240178043A1

公开(公告)日：2024-05-30

申请号：US18510341

申请日：2023-11-15

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Koji NAGAFUCHI ,  Takashi MINAMI

IPC: H01L21/687 ,  B25J11/00 ,  B25J19/02 ,  H01L21/68

CPC classification number: H01L21/68707 ,  B25J11/0095 ,  B25J19/02 ,  H01L21/68

Abstract: A substrate transfer robot system teaches a transfer position of a substrate to a substrate transfer robot that transfers the substrate. The substrate transfer robot includes: a hand that transfers the substrate; a movement mechanism that moves the hand in horizontal and vertical directions; and first and second sensors that are provided on the hand and radiates a scanning line in the horizontal and vertical directions, respectively. The substrate transfer robot system includes: a controller that controls the hand and the movement mechanism; and a first portion to be detected and a second portion to be detected. The controller operates the hand to detect the first portion by the first and second sensors and detect the second portion by the second sensor, and calculates and stores the transfer position based on position information of the hand when the first and second portions are detected.