公开(公告)号：US20250083332A1

公开(公告)日：2025-03-13

申请号：US18824931

申请日：2024-09-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Yoshiki KIMURA ,  Satoshi SUEYOSHI ,  Ryosuke WATANABE ,  Teppei MATSUO

IPC: B25J11/00 ,  B25J9/04 ,  B25J9/16

Abstract: Provided is a robot including: a first movable portion which has a first arm having a proximal end side connected to a first base and a second arm having a proximal end side connected to a distal end side of the first arm; a second movable portion which has a second base having a proximal end side connected to a distal end side of the second arm, a third arm having a proximal end side connected to a distal end side of the second base, and a hand having a proximal end side connected to a distal end side of the third arm and holding a wafer; and a control unit, and a width, in a direction perpendicular to the vertical plane, of a trajectory of the first movable portion falls within a width, in the direction perpendicular to the vertical plane, of a trajectory of the wafer.

公开(公告)号：US20250083303A1

公开(公告)日：2025-03-13

申请号：US18824911

申请日：2024-09-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Yoshiki KIMURA ,  Satoshi SUEYOSHI ,  Ryosuke WATANABE ,  Teppei MATSUO

IPC: B25J9/04 ,  B25J9/16 ,  B25J11/00 ,  B25J13/08

Abstract: Provided is a system including: a housing having a front wall including a plurality of openings for access to a cassette storing a wafer and a back wall facing the front wall; and a robot arranged in the housing, in which the robot has a first base, a first movable portion, a second movable portion having a hand holding the wafer, and a control unit which controls the first movable portion and the second movable portion, and the plurality of openings are positioned in a maximum accessible region of the hand determined based on a position where the robot is arranged in the housing, a length of the first movable portion in a state where the first movable portion is maximally extended, and a length of the second movable portion in a state where the second movable portion is maximally extended.