公开(公告)号：US20250087523A1

公开(公告)日：2025-03-13

申请号：US18824927

申请日：2024-09-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Yoshiki KIMURA ,  Ryosuke WATANABE

IPC: H01L21/687 ,  B25J9/04 ,  B25J11/00 ,  B25J21/00 ,  H01L21/677

Abstract: Provided is a robot arranged in a housing having a front wall having a plurality of openings and a back wall facing the front wall and having an opening, the robot including: a first movable portion; a second movable portion which has a third arm and a hand; an information storage unit which stores cooperative operation-related information; a cooperative operation selection unit selects, based on a position of an access target of access by the hand and the cooperative operation-related information stored in the information storage unit, whether to cause the hand to access the access target by an cooperative operation of the third arm and the hand or to cause the hand to access the access target by an cooperative operation of the third arm, the hand, and the first movable portion; and a control unit which controls the first movable portion and the second movable portion.

公开(公告)号：US20150179491A1

公开(公告)日：2015-06-25

申请号：US14555579

申请日：2014-11-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Shinichi KATSUDA ,  Yoshiki KIMURA

IPC: H01L21/68 ,  B25J9/16 ,  B25J11/00

CPC classification number: B25J9/1679 ,  B25J9/1694 ,  G05B2219/37608 ,  G05B2219/39527 ,  H01L21/67259 ,  H01L21/67742 ,  Y10S901/02

Abstract: A robotic system includes: an arm configured to carry a substrate to a mounting base; a hand disposed at a tip portion of the arm, the hand being configured to hold the substrate when the substrate is carried; a detector disposed on the hand, the detector being configured to detect the substrate; and an acquirer configured to recognize heights of the detector when the substrate is detected at a first position and a second position by the detector as heights of the substrate at respective positions and acquire a mounted-state of the substrate mounted on the mounting base based on the height of the substrate at the first position and the height of the substrate at the second position.

Abstract translation: 机器人系统包括：臂，被配置为将基板运送到安装基座; 设置在所述臂的尖端部分的手，所述手被构造成在所述基板被承载时保持所述基板; 设置在手上的检测器，所述检测器被配置为检测所述基板; 以及拾取器，被配置为当基板在第一位置和第二位置处被检测器识别高度时，作为基板在各个位置的高度，并且基于安装在安装基座上的基板的安装状态，基于 第一位置处的基板的高度和第二位置处的基板的高度。

公开(公告)号：US20240186175A1

公开(公告)日：2024-06-06

申请号：US18510394

申请日：2023-11-15

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Takashi MINAMI ,  Yoshiki KIMURA ,  Hiroki SANEMASA

IPC: H01L21/687 ,  B25J11/00 ,  B25J19/02 ,  H01L21/68

CPC classification number: H01L21/68707 ,  B25J11/0095 ,  B25J19/021 ,  H01L21/681

Abstract: A substrate transfer apparatus includes a hand that transfers a substrate from a cassette that accommodates substrates in multiple stages in a vertical direction; a movement mechanism that moves the hand; a controller that controls the movement mechanism; and a first detection unit that detects the substrate. The controller includes an offset amount change unit that changes an offset amount by which the hand is moved up and down from a substrate support height of the cassette when the hand loads and unloads the substrate with respect to the cassette, according to a thickness or a deflection amount of the substrate detected by the first detection unit.

公开(公告)号：US20150332947A1

公开(公告)日：2015-11-19

申请号：US14810409

申请日：2015-07-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Yoshiki KIMURA

IPC: H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67766 ,  Y10S414/137

Abstract: A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus. The first apparatus includes a first cassette, a second cassette and a first wall. The second apparatus includes a second wall. The substrate transfer robot transfers a substrate from each of the first cassette and the second cassette to the second apparatus. The substrate transfer robot includes a hand and an arm. The arm includes a first arm rotatable about a center of rotation. The first cassette is closer to the center of rotation than the second cassette. The arm moves with being partially disposed beyond the second wall in plan view and the arm moves without being disposed beyond the second wall in plan view when taking out the substrate from the first cassette.

Abstract translation: 衬底传送系统包括设置在第一装置和第二装置之间限定的机器人安装区域中的衬底传送机器人。 第一装置包括第一盒，第二盒和第一壁。 第二装置包括第二壁。 基板传送机构将基板从第一盒和第二盒中的每一个传送到第二装置。 基板传送机器人包括手和臂。 臂包括可围绕旋转中心旋转的第一臂。 第一盒比第二盒更接近旋转中心。 臂在平面图中部分地设置在第二壁之外移动，并且当从第一盒取出基板时，臂在平面图中移动而不设置在第二壁之外。

公开(公告)号：US20130195601A1

公开(公告)日：2013-08-01

申请号：US13742348

申请日：2013-01-16

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Daisuke SHIN ,  Yoshiki KIMURA

IPC: H01L21/677 ,  B25J9/02

CPC classification number: H01L21/677 ,  B25J9/02 ,  B25J9/042 ,  G05B2219/39082 ,  G05B2219/45032 ,  H01L21/67766 ,  H01L21/67772 ,  Y10S901/40 ,  Y10T29/53365 ,  Y10T29/5337 ,  Y10T29/53435

Abstract: A transfer system according to an embodiment includes a transfer room, a robot, a trajectory generator, a determination unit, and an output unit. The transfer room has an exclusive area defined by a predetermined distance. The robot has an arm unit that is equipped with a robot hand transferring a thin plate-like workpiece and that operates in horizontal directions. The robot is installed in the transfer room so that a minimum turning area of the arm unit overlaps with a part of the exclusive area. The transfer system generates a trajectory of the robot hand, then determines, based on the generated trajectory, whether a part of the arm unit is included in the exclusive area, and outputs a predetermined signal.

Abstract translation: 根据实施例的传送系统包括传送室，机器人，轨迹发生器，确定单元和输出单元。 转移室具有由预定距离限定的排他区域。 机器人具有臂单元，其具有传递薄板状工件并且在水平方向上操作的机器人手。 机器人安装在转移室中，使得臂单元的最小转动面积与专有区域的一部分重叠。 传送系统生成机器人手的轨迹，然后基于生成的轨迹来确定臂单元的一部分是否包括在专用区域中，并输出预定信号。

公开(公告)号：US20250087522A1

公开(公告)日：2025-03-13

申请号：US18824918

申请日：2024-09-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Yoshiki KIMURA ,  Satoshi SUEYOSHI ,  Ryosuke WATANABE

IPC: H01L21/687 ,  B25J9/04 ,  B25J11/00 ,  B25J21/00 ,  H01L21/677

Abstract: Provided is a robot arranged in a housing, the robot including: a first movable portion; a second movable portion having a hand holding a wafer; and a control unit which controls the first movable portion and the second movable portion so as to convey the wafer in a state where the wafer held by the hand is located inside an operation region defined in a space between a front wall and a back wall so as not to overlap an open/close region for a cassette opener, which is provided at a position corresponding to an opening of the front wall, to open and close a cassette, and to cause the hand to access the opening of the front wall in a state where the hand is parallel to a horizontal plane.

公开(公告)号：US20250083303A1

公开(公告)日：2025-03-13

申请号：US18824911

申请日：2024-09-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Yoshiki KIMURA ,  Satoshi SUEYOSHI ,  Ryosuke WATANABE ,  Teppei MATSUO

IPC: B25J9/04 ,  B25J9/16 ,  B25J11/00 ,  B25J13/08

Abstract: Provided is a system including: a housing having a front wall including a plurality of openings for access to a cassette storing a wafer and a back wall facing the front wall; and a robot arranged in the housing, in which the robot has a first base, a first movable portion, a second movable portion having a hand holding the wafer, and a control unit which controls the first movable portion and the second movable portion, and the plurality of openings are positioned in a maximum accessible region of the hand determined based on a position where the robot is arranged in the housing, a length of the first movable portion in a state where the first movable portion is maximally extended, and a length of the second movable portion in a state where the second movable portion is maximally extended.

公开(公告)号：US20150332945A1

公开(公告)日：2015-11-19

申请号：US14810406

申请日：2015-07-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Yoshiki KIMURA

IPC: H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67766 ,  Y10S414/137

Abstract: A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus. The first apparatus includes cassettes. The cassettes are each configured to accommodate at least one substrate. The second apparatus includes a second wall opposite to a first wall. The substrate transfer robot transfers the at least one substrate from each of the cassettes to the second apparatus. The substrate transfer robot includes a base stationary, a hand, and arms. A first arm includes a first end and a second end. The first end is rotatably coupled to the base. A second arm includes a third end and a fourth end. The third end is rotatably coupled to the second end. The second end of the first arm moves beyond the second wall when the substrate transfer robot takes out the substrate from the first apparatus.

Abstract translation: 衬底传送系统包括设置在第一装置和第二装置之间限定的机器人安装区域中的衬底传送机器人。 第一装置包括盒。 盒被配置为容纳至少一个基板。 第二装置包括与第一壁相对的第二壁。 基板传送机构将至少一个基板从每个盒传送到第二装置。 基板传送机器人包括基座固定件，手和臂。 第一臂包括第一端和第二端。 第一端可旋转地联接到基座。 第二臂包括第三端和第四端。 第三端可旋转地联接到第二端。 当基板传送机器人从第一装置取出基板时，第一臂的第二端移动超过第二壁。

公开(公告)号：US20150174763A1

公开(公告)日：2015-06-25

申请号：US14555581

申请日：2014-11-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Yoshiki KIMURA ,  Takashi MINAMI

IPC: B25J9/16 ,  G01D5/34

CPC classification number: H01L21/681 ,  H01L21/67259 ,  Y10S901/30 ,  Y10S901/47

Abstract: A detection system includes: a rotator that causes a mounting base where a circular substrate is to be mounted to rotate around a rotation axis; a detector that detects presence or absence of an outer peripheral portion of the rotating substrate at a plurality of respective detecting positions having different distances from the rotation axis; and a determiner that determines an eccentric state of the substrate based on detection information, the detection information being a combination of a phase of the mounting base when the presence or absence of the outer peripheral portion is switched and the detecting positions.

Abstract translation: 检测系统包括：旋转体，其使得安装基座，其中圆形基板将被安装成围绕旋转轴线旋转; 检测器，其在与所述旋转轴线不同的距离的多个检测位置处检测所述旋转基板的外周部的存在或不存在; 以及确定器，其基于检测信息确定所述基板的偏心状态，所述检测信息是当切换所述外周部分的存在或不存在时所述安装基座的相位与所述检测位置的组合。

公开(公告)号：US20170178938A1

公开(公告)日：2017-06-22

申请号：US15451411

申请日：2017-03-07

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Takashi MINAMI ,  Yoshiki KIMURA

IPC: H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67706 ,  B25J9/0027 ,  B25J9/0087 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/025 ,  H01L21/67742 ,  H01L21/68707

Abstract: A robot system includes a robot including a first hand, a second hand, an arm mechanism, and an elevator. The first hand is to hold a substrate. The second hand is to hold the substrate. The arm mechanism supports the first hand and the second hand to provide a height difference between the first hand and the second hand in a height direction of the robot. The elevator is to move the arm mechanism in the height direction within a moving range larger than the height difference. Both the first hand and the second hand put the substrate in the holder. Circuitry is configured to control the robot to move the arm mechanism in the height direction by the elevator to pass the substrate from the first hand to the second hand via the holder.