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公开(公告)号：US20200300716A1
公开(公告)日：2020-09-24
申请号：US16823705
申请日：2020-03-19
Applicant: KCTECH CO., LTD.
Inventor： Jae Won LEE , Ju Young LEE , Kyung Cheol JEONG , Jun Ho LEE , Yong Guk PARK
Abstract: Disclosed is a temperature detection device. The device for detecting temperature of a processing liquid for substrate processing according to an embodiment includes a temperature measurement sensor installed adjacent to an outer surface of a tube through which the processing liquid flows, in which the temperature measurement sensor senses the temperature of the processing liquid in the tube.
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