公开(公告)号：US12209016B2

公开(公告)日：2025-01-28

申请号：US17640890

申请日：2020-09-09

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Thomas D. Anthopoulos ,  Kalaivanan Loganathan ,  Ulrich Buttner ,  Emre Yengel ,  Hendrik Andreas Faber

IPC: B29C33/38 ,  B01L3/00 ,  B29C33/42 ,  B81C99/00 ,  G03F7/00

Abstract: A method for manufacturing a soft stamp includes providing a substrate having a first electrode and a second electrode, the second electrode being formed at a distance less than 100 nm from the first electrode so that a nanogap Ng is formed between the first and second electrodes; pouring a curable substance over the first and second electrodes and into the nanogap Ng; curing the curable substance to form a soft stamp; and removing the soft stamp from the first and second electrodes. The soft stamp has a nano-feature having a size less than 100 nm.