公开(公告)号：US20250020598A1

公开(公告)日：2025-01-16

申请号：US18646704

申请日：2024-04-25

Applicant: KLA Corporation

Inventor： Rajkumar Theagarajan ,  Yujie Dong ,  Jing Zhang ,  Brian Duffy ,  Atiqur Rahman Chowdhury ,  Kris Bhaskar ,  Yang Li ,  Graham Jensen

IPC: G01N21/95 ,  G06T7/00

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem that include a setup deep learning (DL) model configured for separately performing defect detection for a specimen based on output generated for the specimen by each of two or more modes of an inspection system, respectively, and separately re-performing defect detection for the specimen based on masked output generated for each of the modes, respectively. The computer subsystem determines a difference between results of separately performing and separately re-performing the defect detections for each of the modes, respectively, and identifies a subset of the modes for which the difference is larger than other modes as candidate mode(s) for inspection of the specimen.