公开(公告)号：US20250062098A1

公开(公告)日：2025-02-20

申请号：US18424069

申请日：2024-01-26

Applicant: KLA Corporation

Inventor： Xiaoxue Chen ,  Youfei Jiang ,  Balaji Srinivasan ,  Arjun Hegde

IPC: H01J37/153 ,  H01J37/147 ,  H01J37/244 ,  H01J37/28

Abstract: A method for dynamic aberration correction includes generating a primary electron beam with an electron beam source. The method includes directing the primary electron beams to a sample with an electron-optical column and deflecting the primary electron beam to an objective lens of the electron-optical column using a first Wien filter to correct for coma blur in the primary electron beam. The method includes generating off-axis chromatic aberration in the primary electron beam using the objective lens. The method includes adjusting one of a strength or orientation of the Wien filter to correct the off-axis chromatic aberration in the primary electron beam generated by the objective lens. The method includes detecting one or more secondary electrons emanating from the sample.