公开(公告)号：US20230196732A1

公开(公告)日：2023-06-22

申请号：US17557014

申请日：2021-12-20

Applicant: KLA Corporation

Inventor： David Kucher ,  Sophie Salomon ,  Vijay Ramachandran

IPC: G06V10/77 ,  G06V10/54 ,  G06V10/82 ,  G06N3/063 ,  G06T7/73 ,  G06T5/50 ,  G06T7/194

CPC classification number: G06V10/7715 ,  G06N3/063 ,  G06T5/50 ,  G06T7/73 ,  G06T7/194 ,  G06V10/54 ,  G06V10/82 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem configured for determining a global texture characteristic of an image of a specimen and one or more local characteristics of a localized area in the image. The system also includes one or more components executed by the computer subsystem. The component(s) include a machine learning model configured for determining information for the specimen based on the global texture characteristic and the one or more local characteristics. The computer subsystem is also configured for generating results including the determined information. The methods and systems may be used for metrology (in which the determined information includes one or more characteristics of a structure formed on the specimen) or inspection (in which the determined information includes a classification of a defect detected on the specimen).

公开(公告)号：US12080050B2

公开(公告)日：2024-09-03

申请号：US17557014

申请日：2021-12-20

Applicant: KLA Corporation

Inventor： David Kucher ,  Sophie Salomon ,  Vijay Ramachandran

IPC: G06V10/77 ,  G06N3/063 ,  G06T5/50 ,  G06T7/194 ,  G06T7/73 ,  G06V10/54 ,  G06V10/82

CPC classification number: G06V10/7715 ,  G06N3/063 ,  G06T5/50 ,  G06T7/194 ,  G06T7/73 ,  G06V10/54 ,  G06V10/82 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem configured for determining a global texture characteristic of an image of a specimen and one or more local characteristics of a localized area in the image. The system also includes one or more components executed by the computer subsystem. The component(s) include a machine learning model configured for determining information for the specimen based on the global texture characteristic and the one or more local characteristics. The computer subsystem is also configured for generating results including the determined information. The methods and systems may be used for metrology (in which the determined information includes one or more characteristics of a structure formed on the specimen) or inspection (in which the determined information includes a classification of a defect detected on the specimen).