公开(公告)号：US11794314B2

公开(公告)日：2023-10-24

申请号：US17562544

申请日：2021-12-27

Applicant: KLA Corporation

Inventor： Lim Chow Tian ,  Rajeev Patil ,  Harit Maganlal Gadhia

IPC: H01L21/683 ,  B25B11/00 ,  G01N21/95

CPC classification number: B25B11/005 ,  G01N21/9501 ,  H01L21/6838

Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.

公开(公告)号：US20230069384A1

公开(公告)日：2023-03-02

申请号：US17562544

申请日：2021-12-27

Applicant: KLA Corporation

Inventor： Lim Chow Tian ,  Rajeev Patil ,  Harit Maganlal Gadhia

IPC: B25B11/00 ,  H01L21/683 ,  G01N21/95

Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.