公开(公告)号：US11794314B2

公开(公告)日：2023-10-24

申请号：US17562544

申请日：2021-12-27

Applicant: KLA Corporation

Inventor： Lim Chow Tian ,  Rajeev Patil ,  Harit Maganlal Gadhia

IPC: H01L21/683 ,  B25B11/00 ,  G01N21/95

CPC classification number: B25B11/005 ,  G01N21/9501 ,  H01L21/6838

Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.

公开(公告)号：US20240183790A1

公开(公告)日：2024-06-06

申请号：US18120765

申请日：2023-03-13

Applicant: KLA Corporation

Inventor： Lim Chow Tian ,  Rajeev Patil ,  Jinson Jayan

IPC: G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2201/025

Abstract: A lifter assembly for an optical system includes a chuck having a chuck base and a detachable top plate, wherein the detachable top plate is one of a plurality of interchangeable detachable top plates configured to support a substrate. The lifter assembly also includes a moveable plate supporting the chuck on an upper surface of the moveable plate, the moveable plate vertically adjustable between a lower, retracted position and an upper, extended position. The lifter assembly further includes a bellows structure operatively coupled to the moveable plate. The lifter assembly yet further includes a pneumatic system fluidly coupled to the bellows structure to selectively expand and contract, wherein expansion of the bellows structure vertically adjusts the moveable plate to the upper, extended position and contraction of the bellows structure vertically adjusts the moveable plate to the lower, retracted position.

公开(公告)号：US20230069384A1

公开(公告)日：2023-03-02

申请号：US17562544

申请日：2021-12-27

Applicant: KLA Corporation

Inventor： Lim Chow Tian ,  Rajeev Patil ,  Harit Maganlal Gadhia

IPC: B25B11/00 ,  H01L21/683 ,  G01N21/95

Abstract: An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.

公开(公告)号：US20210231292A1

公开(公告)日：2021-07-29

申请号：US17228543

申请日：2021-04-12

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Panzer ,  Matthew Derstine ,  Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Rudolf Brunner

IPC: F21V9/06 ,  H01J61/52 ,  H01J61/12 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/34 ,  H01J61/35 ,  H01J61/40 ,  H01J65/04

Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.