公开(公告)号：US20230260100A1

公开(公告)日：2023-08-17

申请号：US17671519

申请日：2022-02-14

Applicant: KLA Corporation

Inventor： Jing Zhang ,  Rajkumar Theagarajan ,  Yujie Dong ,  John Song ,  Kris Bhaskar

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem that include a deep learning (DL) model trained without labeled data (e.g., in an unsupervised or self-supervised manner) and configured to generate a reference for a specimen from one or more inputs that include at least a specimen image or data generated from the specimen image. The computer subsystem is configured for determining information for the specimen from the reference and at least the specimen image or the data generated from the specimen image.

公开(公告)号：US20240013365A9

公开(公告)日：2024-01-11

申请号：US17671519

申请日：2022-02-14

Applicant: KLA Corporation

Inventor： Jing Zhang ,  Rajkumar Theagarajan ,  Yujie Dong ,  John Song ,  Kris Bhaskar

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem that include a deep learning (DL) model trained without labeled data (e.g., in an unsupervised or self-supervised manner) and configured to generate a reference for a specimen from one or more inputs that include at least a specimen image or data generated from the specimen image. The computer subsystem is configured for determining information for the specimen from the reference and at least the specimen image or the data generated from the specimen image.