公开(公告)号：US11415526B2

公开(公告)日：2022-08-16

申请号：US17136919

申请日：2020-12-29

Applicant: KLA Corporation

Inventor： Brian Duffy ,  Mark Roulo ,  Ashok Mathew ,  Jing Zhang ,  Kris Bhaskar

IPC: G01N21/95 ,  G01N21/88

Abstract: An inspection system is disclosed. The inspection system includes a shared memory configured to receive image data from a defect inspection tool and a controller communicatively coupled to the shared memory. The controller includes a host image module configured to apply one or more general-purpose defect-inspection algorithms to the image data using central-processing unit (CPU) architectures, a results module configured to generate inspection data for defects identified by the host image module, and secondary image module(s) configured to apply one or more targeted defect-inspection algorithms to the image data. The secondary image module(s) employ flexible sampling of the image data to match a data processing rate of the host image module within a selected tolerance. The flexible sampling of the image data is adjusted responsive to the inspection data generated by the results module and the host image module.

公开(公告)号：US20210349038A1

公开(公告)日：2021-11-11

申请号：US17136919

申请日：2020-12-29

Applicant: KLA Corporation

Inventor： Brian Duffy ,  Mark Roulo ,  Ashok Mathew ,  Jing Zhang ,  Kris Bhaskar

IPC: G01N21/95 ,  G01N21/88

Abstract: An inspection system is disclosed. The inspection system includes a shared memory configured to receive image data from a defect inspection tool and a controller communicatively coupled to the shared memory. The controller includes a host image module configured to apply one or more general-purpose defect-inspection algorithms to the image data using central-processing unit (CPU) architectures, a results module configured to generate inspection data for defects identified by the host image module, and secondary image module(s) configured to apply one or more targeted defect-inspection algorithms to the image data. The secondary image module(s) employ flexible sampling of the image data to match a data processing rate of the host image module within a selected tolerance. The flexible sampling of the image data is adjusted responsive to the inspection data generated by the results module and the host image module.