公开(公告)号：US20250118602A1

公开(公告)日：2025-04-10

申请号：US18437429

申请日：2024-02-09

Applicant: KLA Corporation

Inventor： Michel Pharand ,  Phalguna Rachinayani

IPC: H01L21/66 ,  G01R33/07 ,  H01L21/677 ,  H02K1/18 ,  H02K1/2783

Abstract: A system includes a stator, and a first carrier and a second carrier disposed over a horizontal surface of the stator. A plurality of electromagnetic coils are disposed in an array beneath the horizontal surface. The first carrier and the second carrier each include plurality of magnets arranged in an array and are configured to support a first substrate and a second substrate, respectively. A controller is configured to individually energize each of the plurality of electromagnetic coils, which causes the first carrier and the second carrier to levitate above the horizontal surface and independently move in a loop relative to the horizontal surface. The plurality of electromagnetic coils can apply a differential force to adjust a planar alignment of the first substrate or the second substrate, and a metrology tool can take one or more measurements of the first substrate or the second substrate.

公开(公告)号：US11955308B1

公开(公告)日：2024-04-09

申请号：US17950768

申请日：2022-09-22

Applicant: KLA Corporation

Inventor： Michel Pharand

IPC: H01J35/10 ,  F16C33/10

CPC classification number: H01J35/106 ,  H01J35/1017 ,  H01J35/104 ,  F16C33/107 ,  H01J2235/1026

Abstract: Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

公开(公告)号：US20240120235A1

公开(公告)日：2024-04-11

申请号：US18375920

申请日：2023-10-02

Applicant: KLA Corporation

Inventor： Michel Pharand ,  Stephen Doll ,  Samir Nayfeh

IPC: H01L21/687 ,  H02K3/47 ,  H02K7/09 ,  H02K41/03

CPC classification number: H01L21/68764 ,  H02K3/47 ,  H02K7/09 ,  H02K41/031

Abstract: Methods and systems for realizing a high throughput wafer positioning system with high positioning accuracy are presented herein. The high throughput, high accuracy wafer positioning system is employed to measure structural and material characteristics (e.g., material composition, dimensional characteristics of structures and films, etc.) associated with different semiconductor fabrication processes. In one aspect, iron core linear motor assemblies are arranged in a magnetically opposed configuration such that the magnetic attraction forces inherent to each opposing iron core linear motor assembly largely cancel one another. The reduced force applied to sensitive stage frame elements, in turn, reduces induced deformations and stage positioning errors. In some embodiments, a wafer positioning system includes stacked magnetically opposed long stroke stages. In some of these embodiments, both magnetically opposed long stroke stages employ magnet tracks mechanically coupled to the intermediate frame of the stacked stage assembly.

公开(公告)号：US20240105414A1

公开(公告)日：2024-03-28

申请号：US17950768

申请日：2022-09-22

Applicant: KLA Corporation

Inventor： Michel Pharand

IPC: H01J35/10

CPC classification number: H01J35/106 ,  H01J35/1017 ,  F16C33/107

Abstract: Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.