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    Water cooled, air bearing based rotating anode x-ray illumination source
    1.
    发明授权
    Water cooled, air bearing based rotating anode x-ray illumination source 有权

    公开(公告)号：US11955308B1

    公开(公告)日：2024-04-09

    申请号：US17950768

    申请日：2022-09-22

    申请人： KLA Corporation

    发明人： Michel Pharand

    IPC分类号： H01J35/10 ,  F16C33/10

    CPC分类号： H01J35/106 ,  H01J35/1017 ,  H01J35/104 ,  F16C33/107 ,  H01J2235/1026

    摘要： Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

    X-RAY EMITTER
    5.
    发明申请
    X-RAY EMITTER 审中-公开
    X射线发射器

    公开(公告)号：US20120257722A1

    公开(公告)日：2012-10-11

    申请号：US13444071

    申请日：2012-04-11

    申请人： Guenter Heidrich

    发明人： Guenter Heidrich

    IPC分类号： H01J35/10

    CPC分类号： H01J35/305 ,  H01J2235/1026

    摘要： An x-ray emitter has a rotating envelope x-ray tube that is rotatably mounted on a shaft in an emitter housing filled with a cooling and insulating agent, and a drive apparatus coupled to the rotating envelope x-ray tube by the shaft. The emitter housing is hermetically sealed and the drive apparatus includes a predetermined number of permanent magnets as well as electromagnets corresponding thereto. The permanent magnets are arranged within the emitter housing and alternate annularly around the shaft in terms of their polarity. The electromagnets are arranged on an exterior of the emitter housing and can be controlled by a control and regulating unit to produce a rotating alternating field. The x-ray emitter is suited to high rotational speeds and/or to high pressures of the cooling and insulating agent in the emitter housing.

    摘要翻译： x射线发射器具有可旋转地安装在充满冷却和绝缘剂的发射器壳体中的轴上的旋转包络线X射线管，以及通过轴连接到旋转外壳x射线管的驱动装置。 发射器壳体是密封的，并且驱动装置包括预定数量的永磁体以及对应的电磁体。 永磁体被布置在发射器壳体内，并且在它们的极性方面围绕轴环绕环形交替。 电磁铁布置在发射器壳体的外部，并且可以由控制和调节单元控制以产生旋转的交变场。 x射线发射器适用于发射器壳体中的冷却和绝缘剂的高转速和/或高压。

    Rotary anode X-ray tube
    6.
    发明授权
    Rotary anode X-ray tube 失效
    旋转阳极X射线管

    公开(公告)号：US4468800A

    公开(公告)日：1984-08-28

    申请号：US270366

    申请日：1981-06-04

    申请人： Rudolf Friedel ,  Ernst Geldner

    发明人： Rudolf Friedel ,  Ernst Geldner

    IPC分类号： H01J35/10 ,  H01J35/04

    CPC分类号： H01J35/101 ,  H01J35/10 ,  H01J35/103 ,  H01J2235/1026 ,  H01J2235/1073 ,  H01J2235/1266

    摘要： In exemplary embodiments, the anode is driven by an induction motor, between the stator and rotor of which the wall of the vacuum envelope of the tube is disposed. To reduce the overall length and the lever actions of the weight of the anode which act on the bearing which are disadvantageous in this construction, the disclosure provides an annular anode which is disposed in the same plane with the drive rotor. The rotor and stator can here be surrounded by the ring of the anode or they can be secured externally about the latter. X-ray tubes in accordance with the disclosure are particularly suited for use for the purpose of medical x-ray examination.

    摘要翻译： 在示例性实施例中，阳极由感应电动机驱动，在其定子和转子之间，管的真空外壳的壁被布置。 为了减小作用于轴承的阳极的重量的总长度和杠杆作用，这在该结构中是不利的，本发明提供一种与驱动转子设置在同一平面内的环形阳极。 转子和定子在这里可以被阳极的环包围，或者它们可以在外部固定在其上。 根据本公开的X射线管特别适用于医疗x射线检查的目的。

    Rotary-anode X-ray tube
    7.
    发明授权
    Rotary-anode X-ray tube 失效
    旋转阳极X射线管

    公开(公告)号：US4065674A

    公开(公告)日：1977-12-27

    申请号：US730675

    申请日：1976-10-07

    申请人： Herman Gerard Lakerveld ,  Johan Adriaan Rietdijk

    发明人： Herman Gerard Lakerveld ,  Johan Adriaan Rietdijk

    IPC分类号： H01J35/10 ,  H02K17/30 ,  H05G1/70

    CPC分类号： H02K17/30 ,  H01J35/101 ,  H01J2235/1026

    摘要： The stator of the drive motor of a rotary anode X-ray tube is composed of a plurality of radially displaceable sector elements. As a result, the anode can be accelerated and decelerated while using a narrow airgap, and the airgap can be widened for bridging the high voltage to be applied at a later stage. The invention can be realized in automated form by using a blocking device for the high voltage and a tachometer.

    摘要翻译： 旋转阳极X射线管的驱动马达的定子由多个可径向移动的扇形元件组成。 结果，阳极可以在使用狭窄的气隙时加速和减速，并且可以加宽气隙以桥接在稍后阶段施加的高电压。 本发明可以通过使用用于高电压的阻塞装置和转速计来以自动化形式实现。

    Rotary-anode X-ray tube
    8.
    发明授权
    Rotary-anode X-ray tube 失效
    旋转阳极X射线管

    公开(公告)号：US4024424A

    公开(公告)日：1977-05-17

    申请号：US632587

    申请日：1975-11-17

    申请人： Harry Eggelsmann ,  Claus Peter Hodum

    发明人： Harry Eggelsmann ,  Claus Peter Hodum

    IPC分类号： H01J35/10 ,  H01J35/04

    CPC分类号： H01J35/101 ,  H01J35/103 ,  H01J2235/1026

    摘要： A rotary anode X-ray tube wherein the anode carries the high voltage during operation; to achieve shorter acceleration times of the rotor, an insulator is provided between the rotor and the anode disc so that only a minimum air gap is required between the rotor and the stator.

    摘要翻译： 一种旋转阳极X射线管，其中阳极在运行期间承受高电压; 为了实现转子的较短的加速时间，在转子和阳极盘之间设置绝缘体，使得在转子和定子之间仅需要最小的气隙。

    Rotary anode arrangement and X-ray tube
    10.
    发明授权
    Rotary anode arrangement and X-ray tube 有权

    公开(公告)号：US09847206B2

    公开(公告)日：2017-12-19

    申请号：US14413638

    申请日：2013-04-24

    申请人： SIEMENS AKTIENGESELLSCHAFT

    发明人： Zeljko Jajtic ,  Thomas Weidinger

    IPC分类号： H01J35/10

    CPC分类号： H01J35/103 ,  H01J35/101 ,  H01J2235/1026 ,  H01J2235/1073

    摘要： The embodiments relate to a rotary anode arrangement with a rotary anode, a rotor for driving the rotary anode and a stator, which exerts a torque on the rotor. The stator includes at least one coil for generating a first magnetic field and at least one permanent magnet for generating a second magnetic field. The embodiments also relate to an X-ray tube with the rotary anode arrangement. The embodiments offer the advantage that a high electromagnetic utilization is possible with a synchronous motor that is excited by permanent magnets.