公开(公告)号：US20240276625A1

公开(公告)日：2024-08-15

申请号：US18438165

申请日：2024-02-09

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Patrick Casey

IPC: H05G2/00

CPC classification number: H05G2/008

Abstract: A laser-sustained broadband light source is disclosed. The light source may include a gas containment structure containing a mixture of a first noble gas and a second noble gas. The light source may include a laser pump source to generate an optical pump to sustain a plasma within the gas containment structure. The first noble gas absorbs broadband light within a first wavelength band and a second wavelength band. The light source may include a filter positioned within the gas containment structure and configured to absorb the broadband light emitted by the plasma having a wavelength below a selected wavelength threshold. The absorption of broadband light by the first noble gas and the filter provide long-pass filtering of broadband light below the selected wavelength to protect one or more downstream optical elements from damage.