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1.发明公开公开(公告)号：US20240138048A1
公开(公告)日：2024-04-25
申请号：US18535840
申请日：2023-12-11
申请人： KLA Corporation
发明人： John Szilagyi , Ilya Bezel
摘要： An illumination system includes a gas containment vessel configured to contain a gas. The illumination system also includes one or more pump sources configured to generate one or more pump beams. The illumination system includes an ozone generation unit including one or more illumination sources. The one or more illumination sources are configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3). One or more energy sources are configured to ignite the plasma within the gas contained within the gas containment vessel via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen, wherein the plasma emits broadband radiation.
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公开(公告)号：US20230046314A1
公开(公告)日：2023-02-16
申请号：US17880472
申请日：2022-08-03
申请人： KLA Corporation
发明人： Oleg Khodykin , Ilya Bezel
摘要： A plasma lamp is disclosed. The plasma lamp includes a gas containment structure configured to contain a gas and generate a plasma within the gas containment structure. The gas containment structure is formed from a glass material transparent to illumination from a pump laser and the broadband radiation emitted by the plasma. The gas containment structure includes a glass wall and the glass within the glass wall includes an OH concentration distribution that varies across a thickness of the glass wall.
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公开(公告)号：US20210092826A1
公开(公告)日：2021-03-25
申请号：US17024565
申请日：2020-09-17
申请人： KLA Corporation
发明人： Ilya Bezel , Leonid Borisovich Zvedenuk , Andrey Evgenievich Stepanov , Maksim Alexandrovich Deminskii , Boris Vasilyevich Potapkin
摘要： A broadband light source is disclosed. The broadband light source includes a rotatable gas containment structure. The broadband light source includes a rotational drive system configured to rotate the rotatable gas containment structure about the horizonal axis of rotation of the rotatable gas containment structure. The broadband light source includes a pump source configured to generate pump illumination and a reflector element configured to direct a portion of the pump illumination into the gas to sustain a plasma. The reflector is configured to collect a portion of broadband light emitted from the plasma.
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公开(公告)号：US20230053035A1
公开(公告)日：2023-02-16
申请号：US17880455
申请日：2022-08-03
申请人： KLA Corporation
摘要： A plasma lamp for use in a laser-sustained plasma (LSP) light source is disclosed. The plasma lamp includes a gas containment structure for containing a gas, a gas seal positioned at a base of the gas containment structure, a gas inlet, and a gas outlet. The plasma lamp includes a gas swirler including a set of nozzles configured to generate a vortex gas flow and a swirler shaft including an inlet channel for delivering the gas from the gas inlet to the nozzles and an outlet channel for delivering the gas from the gas containment structure to the gas outlet. The plasma lamp includes a distributor including one or more plenums to distribute the gas from the gas inlet into the swirler. The plasma lamp may also include a deflector fluidically coupled to the swirler shaft and extending above the set of nozzles and configured to direct gas flow around the swirler.
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5.发明授权公开(公告)号：US11121521B2
公开(公告)日：2021-09-14
申请号：US16791488
申请日：2020-02-14
申请人： KLA Corporation
摘要： A system for pumping laser sustained plasma is disclosed. The system includes a plurality of pump modules configured to generate respective pulses of pump illumination for the laser sustained plasma, wherein at least one pump module is configured to generate a train of pump pulses that is interlaced in time with another train of pump pulses generated by at least one other pump module of the plurality of pump modules. The system further includes a plurality of non-collinear illumination paths configured to direct the respective pulses of pump illumination from the plurality of pump modules into a collection volume of the laser sustained plasma.
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公开(公告)号：US12033845B2
公开(公告)日：2024-07-09
申请号：US18132162
申请日：2023-04-07
申请人： KLA Corporation
发明人： John Szilagyi , Ilya Bezel
CPC分类号： H01J65/042 , H01J61/025 , H01J61/16 , H01J61/28 , H01J61/52
摘要： A laser-sustained broadband light source includes a gas containment structure and multiple jet nozzles. The jet nozzles are configured to direct multiple liquid jets of plasma-forming material in directions to collide with one another within the gas containment structure. The laser-sustained broadband light source further includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure at a collision point of the plurality of liquid jets and a light collector element configured to collect broadband light emitted from the plasma.
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公开(公告)号：US20240276625A1
公开(公告)日：2024-08-15
申请号：US18438165
申请日：2024-02-09
申请人： KLA Corporation
发明人： Ilya Bezel , Patrick Casey
IPC分类号： H05G2/00
CPC分类号： H05G2/008
摘要： A laser-sustained broadband light source is disclosed. The light source may include a gas containment structure containing a mixture of a first noble gas and a second noble gas. The light source may include a laser pump source to generate an optical pump to sustain a plasma within the gas containment structure. The first noble gas absorbs broadband light within a first wavelength band and a second wavelength band. The light source may include a filter positioned within the gas containment structure and configured to absorb the broadband light emitted by the plasma having a wavelength below a selected wavelength threshold. The absorption of broadband light by the first noble gas and the filter provide long-pass filtering of broadband light below the selected wavelength to protect one or more downstream optical elements from damage.
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公开(公告)号：US20240105440A1
公开(公告)日：2024-03-28
申请号：US18372590
申请日：2023-09-25
申请人： KLA Corporation
发明人： Ilya Bezel , Oleg Khodykin , John Szilagyi
CPC分类号： H01J61/025 , H01J61/16 , H01J61/52 , H01S3/094026 , H01S3/094076 , H01J2893/0063
摘要： A pulse-assisted LSP broadband light source in flowing high-pressure liquid or supercritical fluid is disclosed. The light source includes a fluid containment structure for containing a high-pressure liquid or supercritical fluid. The light source includes a primary laser pump source and a high-repetition pulse-assisting laser light source. wherein the primary laser pump source is configured to direct a primary pump beam into a plasma-forming region of the fluid. The primary beam and the pulsed-assisting beam are configured to sustain a plasma within the plasma-forming region of the fluid within the fluid containment structure. A light collector element is configured to collect broadband light emitted from the plasma for use in downstream applications.
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公开(公告)号：US11921297B2
公开(公告)日：2024-03-05
申请号：US17682919
申请日：2022-02-28
申请人： KLA Corporation
发明人： Ilya Bezel , Matthew Derstine , Andrey Stepanov , Nikolay Sherbak
CPC分类号： G02B27/0927 , G02B5/001 , G02B27/0944 , G02B27/0955 , H01S3/0071 , H05G2/008 , H05H1/02 , H01S3/1611 , H01S3/1643
摘要： A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.
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公开(公告)号：US11844172B2
公开(公告)日：2023-12-12
申请号：US16654230
申请日：2019-10-16
申请人： KLA Corporation
发明人： John Szilagyi , Ilya Bezel
摘要： An illumination system includes a gas containment vessel configured to contain a gas. The illumination system also includes one or more pump sources configured to generate one or more pump beams. The illumination system includes an ozone generation unit including one or more illumination sources. The one or more illumination sources are configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3). One or more energy sources are configured to ignite the plasma within the gas contained within the gas containment vessel via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen, wherein the plasma emits broadband radiation.
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