公开(公告)号：US11922619B2

公开(公告)日：2024-03-05

申请号：US18128140

申请日：2023-03-29

Applicant: KLA Corporation

Inventor： Brian Duffy ,  Bradley Ries ,  Laurent Karsenti ,  Kuljit S. Virk ,  Asaf J. Elron ,  Ruslan Berdichevsky ,  Oriel Ben Shmuel ,  Shlomi Fenster ,  Yakir Gorski ,  Oren Dovrat ,  Ron Dekel ,  Emanuel Garbin ,  Sasha Smekhov

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G06T2207/20076 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: A context-based inspection system is disclosed. The system may include an optical imaging sub-system. The system may further include one or more controllers communicatively coupled to the optical imaging system. The one or more controllers may be configured to: receive one or more reference images; receive one or more test images of a sample; generate one or more probabilistic context maps during inspection runtime using an unsupervised classifier; provide the generated one or more probabilistic context maps to a supervised classifier during the inspection runtime; and apply the supervised classifier to the received one or more test images to identify one or more DOIs on the sample.

公开(公告)号：US20230316500A1

公开(公告)日：2023-10-05

申请号：US18128140

申请日：2023-03-29

Applicant: KLA Corporation

Inventor： Brian Duffy ,  Bradley Ries ,  Laurent Karsenti ,  Kuljit S. Virk ,  Asaf J. Elron ,  Ruslan Berdichevsky ,  Oriel Ben Shmuel ,  Shlomi Fenster ,  Yakir Gorski ,  Oren Dovrat ,  Ron Dekel ,  Emanuel Garbin ,  Sasha Smekhov

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G06T2207/20076 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: A context-based inspection system is disclosed. The system may include an optical imaging sub-system. The system may further include one or more controllers communicatively coupled to the optical imaging system. The one or more controllers may be configured to: receive one or more reference images; receive one or more test images of a sample; generate one or more probabilistic context maps during inspection runtime using an unsupervised classifier; provide the generated one or more probabilistic context maps to a supervised classifier during the inspection runtime; and apply the supervised classifier to the received one or more test images to identify one or more DOIs on the sample.