公开(公告)号：US12211196B2

公开(公告)日：2025-01-28

申请号：US18305287

申请日：2023-04-21

Applicant: KLA Corporation

Inventor： Kuljit S. Virk ,  Vera Andreeva ,  Lawrence Muray

IPC: G06T7/00 ,  G06V10/774 ,  G06V10/776 ,  G06V20/70

Abstract: Methods and systems for detecting defects in images of a specimen are provided. One system includes a computer subsystem configured for training an ensemble of deep learning models by altering one or more parameters of the ensemble until a pseudo-loss function determined based on output of the ensemble is approximately equal to but not greater than 0.5. The computer subsystem is also configured for detecting defects in runtime specimen images by inputting the runtime specimen images into the trained ensemble and generating runtime labels for the runtime specimen images indicating if a defect has been detected in the runtime specimen images based on outputs of the deep learning models in the trained ensemble.

公开(公告)号：US20230408422A1

公开(公告)日：2023-12-21

申请号：US18139637

申请日：2023-04-26

Applicant: KLA Corporation

Inventor： Grace Hsiu-Ling Chen ,  Kuljit S. Virk ,  Martin Gruebele

IPC: G01N21/93 ,  G01N21/91

CPC classification number: G01N21/93 ,  G01N21/91 ,  G01N2201/0636

Abstract: An inspection is disclosed. The system may include an illumination source configured to illuminate a sample. The sample may include a multi-layer stack including a plurality of layers formed of a first material and at least a second material. The first material may include a light transmissive material and the second material may include light reflective material. A top layer within the stack may include absorptive markers configured to selectively bind to the top layer. The absorptive markers may be configured block light transmission through layers positioned below the top layer. The top layer may include photoluminescent markers configured to selectively bind to the light reflective material to enhance a feature of interest on the sample. The system may include detectors configured to detect photoluminescent emission emitted by the photoluminescent markers and optical elements may be configured to direct the photoluminescent emission to the detectors.

公开(公告)号：US20230314336A1

公开(公告)日：2023-10-05

申请号：US18128125

申请日：2023-03-29

Applicant: KLA Corporation

Inventor： Kuljit S. Virk ,  Minchuan Zhou ,  Indrasen Bhattacharya ,  Abdurrahman Sezginer

IPC: G01N21/88 ,  G06T7/00

CPC classification number: G01N21/8851 ,  G06T7/001 ,  H01L22/12

Abstract: An inspection system may develop an inspection recipe by generating N inspection images of a preliminary sample with one or more optical inspection sub-systems associated with N different optical inspection modes, generating probabilities that each of the locations of the preliminary sample are in background or defect classes using a classifier with the inspection images from at least some combinations of a number M of the optical inspection modes, where M is greater than one and less than N and corresponds to a number of the optical inspection modes to include in the inspection recipe, and selecting one of the combinations of M of the optical inspection modes based on a metric describing a distinction between the background and defect classes. The inspection system may further identify defects on a test sample using M inspection images generated with the selected combination of M of the optical inspection modes.

公开(公告)号：US12298254B2

公开(公告)日：2025-05-13

申请号：US18139637

申请日：2023-04-26

Applicant: KLA Corporation

Inventor： Grace Hsiu-Ling Chen ,  Kuljit S. Virk ,  Martin Gruebele

IPC: G01N21/93 ,  G01N21/91

Abstract: An inspection is disclosed. The system may include an illumination source configured to illuminate a sample. The sample may include a multi-layer stack including a plurality of layers formed of a first material and at least a second material. The first material may include a light transmissive material and the second material may include light reflective material. A top layer within the stack may include absorptive markers configured to selectively bind to the top layer. The absorptive markers may be configured block light transmission through layers positioned below the top layer. The top layer may include photoluminescent markers configured to selectively bind to the light reflective material to enhance a feature of interest on the sample. The system may include detectors configured to detect photoluminescent emission emitted by the photoluminescent markers and optical elements may be configured to direct the photoluminescent emission to the detectors.

公开(公告)号：US20240354925A1

公开(公告)日：2024-10-24

申请号：US18305287

申请日：2023-04-21

Applicant: KLA Corporation

Inventor： Kuljit S. Virk ,  Vera Andreeva ,  Lawrence Muray

IPC: G06T7/00 ,  G06V10/774 ,  G06V10/776 ,  G06V20/70

CPC classification number: G06T7/0004 ,  G06V10/774 ,  G06V10/776 ,  G06V20/70 ,  G06T2207/10061 ,  G06T2207/20076 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Methods and systems for detecting defects in images of a specimen are provided. One system includes a computer subsystem configured for training an ensemble of deep learning models by altering one or more parameters of the ensemble until a pseudo-loss function determined based on output of the ensemble is approximately equal to but not greater than 0.5. The computer subsystem is also configured for detecting defects in runtime specimen images by inputting the runtime specimen images into the trained ensemble and generating runtime labels for the runtime specimen images indicating if a defect has been detected in the runtime specimen images based on outputs of the deep learning models in the trained ensemble.

公开(公告)号：US11922619B2

公开(公告)日：2024-03-05

申请号：US18128140

申请日：2023-03-29

Applicant: KLA Corporation

Inventor： Brian Duffy ,  Bradley Ries ,  Laurent Karsenti ,  Kuljit S. Virk ,  Asaf J. Elron ,  Ruslan Berdichevsky ,  Oriel Ben Shmuel ,  Shlomi Fenster ,  Yakir Gorski ,  Oren Dovrat ,  Ron Dekel ,  Emanuel Garbin ,  Sasha Smekhov

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G06T2207/20076 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: A context-based inspection system is disclosed. The system may include an optical imaging sub-system. The system may further include one or more controllers communicatively coupled to the optical imaging system. The one or more controllers may be configured to: receive one or more reference images; receive one or more test images of a sample; generate one or more probabilistic context maps during inspection runtime using an unsupervised classifier; provide the generated one or more probabilistic context maps to a supervised classifier during the inspection runtime; and apply the supervised classifier to the received one or more test images to identify one or more DOIs on the sample.

公开(公告)号：US20230316500A1

公开(公告)日：2023-10-05

申请号：US18128140

申请日：2023-03-29

Applicant: KLA Corporation

Inventor： Brian Duffy ,  Bradley Ries ,  Laurent Karsenti ,  Kuljit S. Virk ,  Asaf J. Elron ,  Ruslan Berdichevsky ,  Oriel Ben Shmuel ,  Shlomi Fenster ,  Yakir Gorski ,  Oren Dovrat ,  Ron Dekel ,  Emanuel Garbin ,  Sasha Smekhov

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G06T2207/20076 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: A context-based inspection system is disclosed. The system may include an optical imaging sub-system. The system may further include one or more controllers communicatively coupled to the optical imaging system. The one or more controllers may be configured to: receive one or more reference images; receive one or more test images of a sample; generate one or more probabilistic context maps during inspection runtime using an unsupervised classifier; provide the generated one or more probabilistic context maps to a supervised classifier during the inspection runtime; and apply the supervised classifier to the received one or more test images to identify one or more DOIs on the sample.