公开(公告)号：US11450012B2

公开(公告)日：2022-09-20

申请号：US16852359

申请日：2020-04-17

Applicant: KLA Corporation

Inventor： Santosh Bhattacharyya ,  Ge Cong ,  Sanbong Park ,  Boshi Huang

IPC: G06T7/33 ,  G06T7/00 ,  G06K9/62 ,  G06N3/08 ,  G06N20/00 ,  H01J37/22 ,  H01J37/28 ,  G06F17/18

Abstract: A rendered image is aligned with a scanning electron microscope (SEM) image to produce an aligned rendered image. A reference image is aligned with the SEM image to produce an aligned reference image. A threshold probability map also is generated. Dynamic compensation of the SEM image and aligned reference image can produce a corrected SEM image and corrected reference image. A thresholded defect map can be generated and the defects of the thresholded probability map and the signal-to-noise-ratio defects of the thresholded defect map are filtered using a broadband-plasma-based property to produce defect-of-interest clusters.

公开(公告)号：US20220059316A1

公开(公告)日：2022-02-24

申请号：US17182192

申请日：2021-02-22

Applicant: KLA CORPORATION

Inventor： Santosh Bhattacharyya ,  Steve Esbenshade

IPC: H01J37/28 ,  H01J37/244 ,  G06T7/00

Abstract: A scanning electron microscope receives a results file for a wafer from an optical inspection system. The results file includes an anchor point on the wafer. A defect review image at the anchor point on the wafer is generated using the scanning electron microscope. A design clip is aligned to the defect review image at the anchor point thereby generating an aligned defect review image. The aligned defect review image is used for defect detection.

公开(公告)号：US20210133989A1

公开(公告)日：2021-05-06

申请号：US16852359

申请日：2020-04-17

Applicant: KLA Corporation

Inventor： Santosh Bhattacharyya ,  Ge Cong ,  Sanbong Park ,  Boshi Huang

IPC: G06T7/33 ,  G06T7/00 ,  G06K9/62 ,  G06N3/08 ,  G06N20/00 ,  G06F17/18 ,  H01J37/22 ,  H01J37/28

Abstract: A rendered image is aligned with a scanning electron microscope (SEM) image to produce an aligned rendered image. A reference image is aligned with the SEM image to produce an aligned reference image. A threshold probability map also is generated. Dynamic compensation of the SEM image and aligned reference image can produce a corrected SEM image and corrected reference image. A thresholded defect map can be generated and the defects of the thresholded probability map and the signal-to-noise-ratio defects of the thresholded defect map are filtered using a broadband-plasma-based property to produce defect-of-interest clusters.