公开(公告)号：US20210027445A1

公开(公告)日：2021-01-28

申请号：US16935159

申请日：2020-07-21

申请人： KLA Corporation

发明人： Martin Plihal ,  Saravanan Paramasivam ,  Jacob George ,  Niveditha Lakshmi Narasimhan ,  Sairam Ravu ,  Somesh Challapalli ,  Prasanti Uppaluri

IPC分类号： G06T7/00 ,  G06K9/62 ,  G06N20/00

摘要： A system for characterizing a specimen is disclosed. In one embodiment, the system includes a characterization sub-system configured to acquire one or more images a specimen, and a controller communicatively coupled to the characterization sub-system. The controller may be configured to: receive from the characterization sub-system one or more training images of one or more defects of a training specimen; generate one or more augmented images of the one or more defects of the training specimen; generate a machine learning classifier based on the one or more augmented images of the one or more defects of the training specimen; receive from the characterization sub-system one or more target images of one or more target features of a target specimen; and determine one or more defects of the one or more target features with the machine learning classifier.

公开(公告)号：US11676264B2

公开(公告)日：2023-06-13

申请号：US16935159

申请日：2020-07-21

申请人： KLA Corporation

发明人： Martin Plihal ,  Saravanan Paramasivam ,  Jacob George ,  Niveditha Lakshmi Narasimhan ,  Sairam Ravu ,  Somesh Challapalli ,  Prasanti Uppaluri

IPC分类号： G06T7/00 ,  G06N20/00 ,  G06F18/214 ,  G06F18/21 ,  G06V20/69

CPC分类号： G06T7/001 ,  G06F18/214 ,  G06F18/217 ,  G06N20/00 ,  G06V20/69 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

摘要： A system for characterizing a specimen is disclosed. In one embodiment, the system includes a characterization sub-system configured to acquire one or more images a specimen, and a controller communicatively coupled to the characterization sub-system. The controller may be configured to: receive from the characterization sub-system one or more training images of one or more defects of a training specimen; generate one or more augmented images of the one or more defects of the training specimen; generate a machine learning classifier based on the one or more augmented images of the one or more defects of the training specimen; receive from the characterization sub-system one or more target images of one or more target features of a target specimen; and determine one or more defects of the one or more target features with the machine learning classifier.