Tilted slit confocal system configured for automated focus detection and tracking

    公开(公告)号:US11356594B1

    公开(公告)日:2022-06-07

    申请号:US16995681

    申请日:2020-08-17

    Abstract: A system for automated focus tracking of a sample is disclosed. The system comprises an illumination source, a set of illumination optics in an illumination path, a set of collection optics in a collection path, a first slit device in the illumination path, a second slit device in the collection path, at least one detector configured to generate an image of the sample, and a controller configured to receive through-focus information from the image, and provide corrective motion to a stage holding the sample to maintain a position of the sample at a selected focus. A method for automated focus tracking of a sample is also disclosed.

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