公开(公告)号：US11237872B2

公开(公告)日：2022-02-01

申请号：US15978626

申请日：2018-05-14

Applicant: KLA-TENCOR CORPORATION

Inventor： Ajay Gupta ,  Sankar Venkataraman ,  Sashi Balasingam ,  Mohan Mahadevan

IPC: G06F9/50 ,  G06F9/48

Abstract: Real-time job distribution software architectures for high bandwidth, hybrid processor computation systems for semiconductor inspection and metrology are disclosed. The imaging processing computer architecture can be scalable by changing the number of CPUs and GPUs to meet computing needs. The architecture is defined using a master node and one or more worker nodes to run image processing jobs in parallel for maximum throughput. The master node can receive input image data from a semiconductor wafer or reticle. Jobs based on the input image data are distributed to one of the worker nodes. Each worker node can include at least one CPU and at least one GPU. The image processing job can contain multiple tasks, and each of the tasks can be assigned to one of the CPU or GPU in the worker node using a worker job manager to process the image.

公开(公告)号：US20180341525A1

公开(公告)日：2018-11-29

申请号：US15978626

申请日：2018-05-14

Applicant: KLA-TENCOR CORPORATION

Inventor： Ajay Gupta ,  Sankar Venkataraman ,  Sashi Balasingam ,  Mohan Mahadevan

IPC: G06F9/50 ,  G06F9/48

Abstract: Real-time job distribution software architectures for high bandwidth, hybrid processor computation systems for semiconductor inspection and metrology are disclosed. The imaging processing computer architecture can be scalable by changing the number of CPUs and GPUs to meet computing needs. The architecture is defined using a master node and one or more worker nodes to run image processing jobs in parallel for maximum throughput. The master node can receive input image data from a semiconductor wafer or reticle. Jobs based on the input image data are distributed to one of the worker nodes. Each worker node can include at least one CPU and at least one GPU. The image processing job can contain multiple tasks, and each of the tasks can be assigned to one of the CPU or GPU in the worker node using a worker job manager to process the image.