Patent search ap:("KLA-TENCOR CORPORATION") AND inv:"Tanay Bansal" Page 1

1.

发明申请
USING DEEP LEARNING BASED DEFECT DETECTION AND CLASSIFICATION SCHEMES FOR PIXEL LEVEL IMAGE QUANTIFICATION 审中-公开

公开(公告)号：US20200161081A1

公开(公告)日：2020-05-21

申请号：US16249337

申请日：2019-01-16

Applicant: KLA-TENCOR CORPORATION

Inventor： Hari Pathangi , Sivaprrasath Meenakshisundaram , Tanay Bansal

IPC: H01J37/22 , H01J37/28 , G06T7/00

Abstract: A heat map of probable defects in an image can be represented as a matrix of defect probability index corresponding to each pixel. The image may be generated from data received from a detector of a scanning electron microscope or other inspection tools. A number of pixels in the image that exceed a corresponding threshold in the matrix can be quantified.

2.

发明授权
Using deep learning based defect detection and classification schemes for pixel level image quantification 有权

公开(公告)号：US10672588B1

公开(公告)日：2020-06-02

申请号：US16249337

申请日：2019-01-16

Applicant: KLA-TENCOR CORPORATION

Inventor： Hari Pathangi , Sivaprrasath Meenakshisundaram , Tanay Bansal

IPC: H01J37/22 , H01J37/28 , G06T7/00

Abstract: A heat map of probable defects in an image can be represented as a matrix of defect probability index corresponding to each pixel. The image may be generated from data received from a detector of a scanning electron microscope or other inspection tools. A number of pixels in the image that exceed a corresponding threshold in the matrix can be quantified.

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