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公开(公告)号：US10818001B2
公开(公告)日：2020-10-27
申请号：US16241467
申请日：2019-01-07
Applicant: KLA-TENCOR CORPORATION
Inventor： Wing-Shan Ribi Leung , Kaushik Sah , Allen Park , Andrew Cross
Abstract: A stochastic calculation engine receives inputs from a semiconductor inspection tool or semiconductor review tool. The stochastic calculation engine determines abnormal locations and pattern variation from the inputs and determines stochastic failures from the inputs. An electronic data storage unit connected with the stochastic calculation engine can include a database with known stochastic behavior and known process metrology variations. The stochastic calculation engine can flag stochastic features, determine a failure rate, or determine fail probability.
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公开(公告)号：US20200082523A1
公开(公告)日：2020-03-12
申请号：US16241467
申请日：2019-01-07
Applicant: KLA-TENCOR CORPORATION
Inventor： Wing-Shan Ribi Leung , Kaushik Sah , Allen Park , Andrew Cross
Abstract: A stochastic calculation engine receives inputs from a semiconductor inspection tool or semiconductor review tool. The stochastic calculation engine determines abnormal locations and pattern variation from the inputs and determines stochastic failures from the inputs. An electronic data storage unit connected with the stochastic calculation engine can include a database with known stochastic behavior and known process metrology variations. The stochastic calculation engine can flag stochastic features, determine a failure rate, or determine fail probability.
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