公开(公告)号：US09662688B2

公开(公告)日：2017-05-30

申请号：US13935960

申请日：2013-07-05

Applicant: KLA-Tencor Corporation

Inventor： Garry Rose ,  Gildardo Delgado ,  H. Steven Larson ,  Daniel R. Hennigan

IPC: B65B31/00 ,  B08B5/02 ,  G02B27/00

CPC classification number: B08B5/02 ,  G02B27/0006

Abstract: An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber.

公开(公告)号：US09573111B1

公开(公告)日：2017-02-21

申请号：US13935765

申请日：2013-07-05

Applicant: KLA-Tencor Corporation

Inventor： Garry A. Rose ,  Gildardo R. Delgado ,  H. Steven Larson

IPC: B01J19/12

CPC classification number: B01J19/123 ,  C01B13/10 ,  C01B2201/64 ,  C01B2201/82

Abstract: An apparatus for producing a high purity stream of ozone including a reaction chamber having an inlet and an outlet, a gaseous feed stream having a first purified component and an ultraviolet source. The gaseous feed stream enters the reaction chamber through the inlet, the first purified component includes oxygen, the ultraviolet source forms ozone from the oxygen, and the ozone exits the reaction chamber through the outlet.

Abstract translation: 一种用于生产高纯度臭氧流的装置，包括具有入口和出口的反应室，具有第一纯化组分和紫外源的气态进料流。 气态进料流通过入口进入反应室，第一纯化组分包括氧气，紫外线源自氧气形成臭氧，臭氧通过出口离开反应室。

公开(公告)号：US20140007910A1

公开(公告)日：2014-01-09

申请号：US13935960

申请日：2013-07-05

Applicant: KLA-Tencor Corporation

Inventor： Garry Rose ,  Gildardo Delgado ,  H. Steven Larson ,  Daniel R. Hennigan

IPC: B08B5/02

CPC classification number: B08B5/02 ,  G02B27/0006

Abstract: An apparatus for cross-flow purging for optical components in a chamber, including: a housing with first and second axial ends, a side wall extending in an axial direction and connecting the first and second axial ends, and the chamber formed by the first and second axial ends and the side wall; an optical component disposed within the chamber and fixed with respect to the housing via at least one connecting point on the optical component; an inlet port aligned with the side wall, between the first and second axial ends in the axial direction, in a radial direction orthogonal to the axial direction and arranged to inject a purge gas into the chamber and across the optical component in a radial direction orthogonal to the axial direction; and an exhaust port aligned with the side wall in the radial direction and arranged to exhaust the purge gas from the chamber.

Abstract translation: 一种用于腔室中的光学部件的横流吹扫的装置，包括：具有第一和第二轴向端部的壳体，沿轴向方向延伸并连接第一和第二轴向端部的侧壁以及由第一和第二轴向端部形成的腔室 第二轴向端和侧壁; 光学部件，设置在所述腔室内并且经由所述光学部件上的至少一个连接点相对于所述壳体固定; 入口端口，其与所述侧壁对准，在所述第一和第二轴向端部之间沿轴向方向在与所述轴向方向正交的径向方向上，并且布置成将吹扫气体沿径向正交地喷射到所述腔室中并穿过所述光学部件 到轴向; 以及排气口，其在径向方向上与所述侧壁对准并且布置成从所述室排出净化气体。