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    High purity ozone generator for optics cleaning and recovery
    1.
    发明授权
    High purity ozone generator for optics cleaning and recovery 有权
    用于光学清洁和回收的高纯度臭氧发生器

    公开(公告)号：US09573111B1

    公开(公告)日：2017-02-21

    申请号：US13935765

    申请日：2013-07-05

    Applicant: KLA-Tencor Corporation

    Inventor： Garry A. Rose ,  Gildardo R. Delgado ,  H. Steven Larson

    IPC: B01J19/12

    CPC classification number: B01J19/123 ,  C01B13/10 ,  C01B2201/64 ,  C01B2201/82

    Abstract: An apparatus for producing a high purity stream of ozone including a reaction chamber having an inlet and an outlet, a gaseous feed stream having a first purified component and an ultraviolet source. The gaseous feed stream enters the reaction chamber through the inlet, the first purified component includes oxygen, the ultraviolet source forms ozone from the oxygen, and the ozone exits the reaction chamber through the outlet.

    Abstract translation: 一种用于生产高纯度臭氧流的装置，包括具有入口和出口的反应室，具有第一纯化组分和紫外源的气态进料流。 气态进料流通过入口进入反应室，第一纯化组分包括氧气，紫外线源自氧气形成臭氧，臭氧通过出口离开反应室。

    System and Method for Providing a Clean Environment in an Electron-Optical System
    3.
    发明申请
    System and Method for Providing a Clean Environment in an Electron-Optical System 审中-公开
    在电子光学系统中提供清洁环境的系统和方法

    公开(公告)号：US20160358741A1

    公开(公告)日：2016-12-08

    申请号：US15164273

    申请日：2016-05-25

    Applicant: KLA-Tencor Corporation

    Inventor： William G. Schultz ,  Gildardo Delgado ,  Garry A. Rose

    IPC: H01J37/04 ,  H01J37/29

    Abstract: An electron extractor of an electron source capable of absorbing contaminant materials from a cavity proximate to the extractor is disclosed. The electron extractor includes a body. The body of the electron extractor is formed from one or more non-evaporable getter materials. The one or more non-evaporable getter materials absorb one or more contaminants contained within a region proximate to the body of the electron extractor. The body of the electron extractor is further configured to extract electrons from one or more emitters posited proximate to the body of the electron extractor.

    Abstract translation: 公开了能够从靠近提取器的空腔吸收污染物质的电子源的电子提取器。 电子提取器包括一个主体。 电子提取器的主体由一种或多种不可蒸发的吸气剂材料形成。 所述一种或多种不可蒸发的吸气剂材料吸收包含在靠近电子提取器主体的区域内的一种或多种污染物。 电子提取器的主体还被配置为从靠近电子提取器的主体定位的一个或多个发射器提取电子。

    Method and System for Imaging of a Photomask Through a Pellicle
    5.
    发明申请
    Method and System for Imaging of a Photomask Through a Pellicle 有权
    通过防护薄膜成像光掩模的方法和系统

    公开(公告)号：US20160225582A1

    公开(公告)日：2016-08-04

    申请号：US15012599

    申请日：2016-02-01

    Applicant: KLA-Tencor Corporation

    Inventor： William G. Schultz ,  Gildardo Delgado ,  Garry A. Rose

    IPC: H01J37/28 ,  H01J37/147 ,  H01J37/26

    CPC classification number: H01J37/28 ,  G03F1/62 ,  G03F1/86 ,  H01J37/244 ,  H01J2237/2002 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2817

    Abstract: A system for imaging a sample through a protective pellicle is disclosed. The system includes an electron beam source configured to generate an electron beam and a sample stage configured to secure a sample and a pellicle, wherein the pellicle is disposed above the sample. The system also includes an electron-optical column including a set of electron-optical elements to direct at least a portion of the electron beam through the pellicle and onto a portion of the sample. In addition, the system includes a detector assembly positioned above the pellicle and configured to detect electrons emanating from the surface of the sample.

    Abstract translation: 公开了一种通过保护性薄膜成像样品的系统。 该系统包括被配置为产生电子束的电子束源和被配置为固定样品和防护薄膜组件的样品台，其中防护薄膜组件设置在样品上方。 该系统还包括电子 - 光学柱，其包括一组电子 - 光学元件，以将至少一部分电子束通过防护薄膜组件引导到样品的一部分上。 此外，该系统包括位于防护薄膜组件上方并被配置成检测从样品表面发出的电子的检测器组件。

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