公开(公告)号：US10379057B2

公开(公告)日：2019-08-13

申请号：US14984833

申请日：2015-12-30

Applicant: KLA-Tencor Corporation

Inventor： Filip Cauwenberghs ,  Johan DeGreeve ,  Pauline Begoc ,  Koen Goorman

IPC: G01N21/88 ,  H04N5/225

Abstract: An illumination system, an inspection tool and a method for inspecting an object are disclosed. A configurable area light source is arranged in an illumination optical axis of an illumination beam path, wherein the configurable area light source is configured such that different beam diameters are settable. At least one illumination lens is positioned in the illumination beam path for directing a collimated beam at least onto a field of view on a surface of the object, wherein a value of an angle of incidence of the illumination optical axis of the illumination beam path equals a value of an angle of reflectance of the imaging optical axis of the imaging beam path. The invention allows the combination of the functionality of a wide angle coaxial illumination and a collimated coaxial illumination in one illumination system.

公开(公告)号：US20160123892A1

公开(公告)日：2016-05-05

申请号：US14984833

申请日：2015-12-30

Applicant: KLA-Tencor Corporation

Inventor： Filip Cauwenberghs ,  Johan DeGreeve ,  Pauline Begoc ,  Koen Goorman

IPC: G01N21/88 ,  H04N5/225 ,  F21V14/00 ,  F21V5/04 ,  F21V23/00

CPC classification number: G01N21/8806 ,  G01N2021/8835 ,  G01N2201/06126 ,  G01N2201/06153 ,  H04N5/2256

Abstract: An illumination system, an inspection tool and a method for inspecting an object are disclosed. A configurable area light source is arranged in an illumination optical axis of an illumination beam path, wherein the configurable area light source is configured such that different beam diameters are settable. At least one illumination lens is positioned in the illumination beam path for directing a collimated beam at least onto a field of view on a surface of the object, wherein a value of an angle of incidence of the illumination optical axis of the illumination beam path equals a value of an angle of reflectance of the imaging optical axis of the imaging beam path. The invention allows the combination of the functionality of a wide angle coaxial illumination and a collimated coaxial illumination in one illumination system.

Abstract translation: 公开了一种照明系统，检查工具和用于检查物体的方法。 可配置区域光源被布置在照明光束路径的照明光轴中，其中可配置区域光源被配置为使得可以设置不同的光束直径。 至少一个照明透镜被定位在照明光束路径中，用于将准直光束至少引导到物体表面上的视野上，其中照明光束路径的照明光轴的入射角值等于 成像光束路径的摄像光轴的反射角度的值。 本发明允许在一个照明系统中组合广角同轴照明和准直同轴照明的功能。