公开(公告)号：US20170200260A1

公开(公告)日：2017-07-13

申请号：US15402169

申请日：2017-01-09

Applicant: KLA-Tencor Corporation

Inventor： Kris Bhaskar ,  Scott Young ,  Mark Roulo ,  Jing Zhang ,  Laurent Karsenti ,  Mohan Mahadevan ,  Bjorn Brauer

IPC: G06T7/00 ,  G06K9/62 ,  G06K9/66

CPC classification number: G06K9/6256 ,  G06K9/4628 ,  G06K9/6271 ,  G06K2209/19 ,  G06T7/0004 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Methods and systems for performing one or more functions for a specimen using output simulated for the specimen are provided. One system includes one or more computer subsystems configured for acquiring output generated for a specimen by one or more detectors included in a tool configured to perform a process on the specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a learning based model configured for performing one or more first functions using the acquired output as input to thereby generate simulated output for the specimen. The one or more computer subsystems are also configured for performing one or more second functions for the specimen using the simulated output.

公开(公告)号：US20180107928A1

公开(公告)日：2018-04-19

申请号：US15694719

申请日：2017-09-01

Applicant: KLA-Tencor Corporation

Inventor： Jing Zhang ,  Ravi Chandra Donapati ,  Mark Roulo ,  Kris Bhaskar

IPC: G06N3/08 ,  G06T7/00 ,  G06K9/62 ,  G06K9/46

CPC classification number: G06N3/082 ,  G06K9/46 ,  G06K9/4628 ,  G06K9/6256 ,  G06K9/6261 ,  G06K9/6263 ,  G06K9/6267 ,  G06K9/6274 ,  G06K2209/19 ,  G06N3/0454 ,  G06N3/084 ,  G06T7/0004 ,  G06T2207/10056 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Methods and systems for performing diagnostic functions for a deep learning model are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a deep learning model configured for determining information from an image generated for a specimen by an imaging tool. The one or more components also include a diagnostic component configured for determining one or more causal portions of the image that resulted in the information being determined and for performing one or more functions based on the determined one or more causal portions of the image.

公开(公告)号：US10360477B2

公开(公告)日：2019-07-23

申请号：US15402169

申请日：2017-01-09

Applicant: KLA-Tencor Corporation

Inventor： Kris Bhaskar ,  Scott Young ,  Mark Roulo ,  Jing Zhang ,  Laurent Karsenti ,  Mohan Mahadevan ,  Bjorn Brauer

IPC: G06K9/00 ,  G06K9/62 ,  G06K9/66 ,  G06T7/00

Abstract: Methods and systems for performing one or more functions for a specimen using output simulated for the specimen are provided. One system includes one or more computer subsystems configured for acquiring output generated for a specimen by one or more detectors included in a tool configured to perform a process on the specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a learning based model configured for performing one or more first functions using the acquired output as input to thereby generate simulated output for the specimen. The one or more computer subsystems are also configured for performing one or more second functions for the specimen using the simulated output.

公开(公告)号：US11580398B2

公开(公告)日：2023-02-14

申请号：US15694719

申请日：2017-09-01

Applicant: KLA-Tencor Corporation

Inventor： Jing Zhang ,  Ravi Chandra Donapati ,  Mark Roulo ,  Kris Bhaskar

IPC: G06N3/08 ,  G06N3/04 ,  G06K9/62 ,  G06V10/40 ,  G06V10/44 ,  G06T7/00 ,  G06N3/082 ,  G06N3/084

Abstract: Methods and systems for performing diagnostic functions for a deep learning model are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a deep learning model configured for determining information from an image generated for a specimen by an imaging tool. The one or more components also include a diagnostic component configured for determining one or more causal portions of the image that resulted in the information being determined and for performing one or more functions based on the determined one or more causal portions of the image.