-
1.发明授权公开(公告)号：US11580398B2
公开(公告)日：2023-02-14
申请号：US15694719
申请日：2017-09-01
Applicant: KLA-Tencor Corporation
Inventor： Jing Zhang , Ravi Chandra Donapati , Mark Roulo , Kris Bhaskar
Abstract: Methods and systems for performing diagnostic functions for a deep learning model are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a deep learning model configured for determining information from an image generated for a specimen by an imaging tool. The one or more components also include a diagnostic component configured for determining one or more causal portions of the image that resulted in the information being determined and for performing one or more functions based on the determined one or more causal portions of the image.
-
2.发明申请公开(公告)号：US20180107928A1
公开(公告)日：2018-04-19
申请号：US15694719
申请日：2017-09-01
Applicant: KLA-Tencor Corporation
Inventor： Jing Zhang , Ravi Chandra Donapati , Mark Roulo , Kris Bhaskar
CPC classification number: G06N3/082 , G06K9/46 , G06K9/4628 , G06K9/6256 , G06K9/6261 , G06K9/6263 , G06K9/6267 , G06K9/6274 , G06K2209/19 , G06N3/0454 , G06N3/084 , G06T7/0004 , G06T2207/10056 , G06T2207/10061 , G06T2207/20081 , G06T2207/20084 , G06T2207/30148
Abstract: Methods and systems for performing diagnostic functions for a deep learning model are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a deep learning model configured for determining information from an image generated for a specimen by an imaging tool. The one or more components also include a diagnostic component configured for determining one or more causal portions of the image that resulted in the information being determined and for performing one or more functions based on the determined one or more causal portions of the image.
-
Search Results
2
records
(took 0.011 seconds)
