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公开(公告)号：US09841512B2
公开(公告)日：2017-12-12
申请号：US14946563
申请日：2015-11-19
Applicant: KLA-Tencor Corporation
Inventor： Ximan Jiang , Anatoly Romanovsky , Christian Wolters , Stephen Biellak , Mous Tatarkhanov
CPC classification number: G01T1/24 , G01N21/9501
Abstract: An inspection system with radiation-induced false count mitigation includes an illumination source configured to illuminate a sample, a detector assembly comprising an illumination sensor configured to detect illumination from the sample, and one or more radiation sensors configured to detect particle radiation, and control circuitry communicatively coupled to the detector. The control circuitry is configured to perform the steps of determining a set of radiation detection events based on one or more radiation signals received from the radiation sensors, determining a set of imaging events based on the illumination signal received from the illumination sensor, comparing the set of radiation detection events to the set of imaging events to generate a set of coincidence events, wherein the set of coincidence events comprises simultaneous imaging and radiation detection events, and excluding the set of coincidence events from the set of imaging events to generate a set of identified defect sites.
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公开(公告)号：US10241217B2
公开(公告)日：2019-03-26
申请号：US15795028
申请日：2017-10-26
Applicant: KLA-Tencor Corporation
Inventor： Ximan Jiang , Anatoly Romanovsky , Christian Wolters , Stephen Biellak , Mous Tatarkhanov
Abstract: An inspection system with radiation-induced false count mitigation includes a radiation count controller coupled to one or more radiation sensors positioned proximate to an illumination sensor oriented to detect illumination from a sample. The radiation count controller may identify a set of radiation detection events based on radiation signals received from the radiation sensors during operation of the illumination sensor. The inspection system may further include an inspection controller to identify a set of illumination detection events based on an illumination signal, identify one or more features on the sample based on the set of illumination detection events, receive the set of radiation detection events from the radiation count controller, compare the set of radiation detection events to the set of illumination detection events to identify a set of coincidence events, and refine the one or more identified features on the sample based on the set of coincidence events.
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公开(公告)号：US20180045837A1
公开(公告)日：2018-02-15
申请号：US15795028
申请日：2017-10-26
Applicant: KLA-Tencor Corporation
Inventor： Ximan Jiang , Anatoly Romanovsky , Christian Wolters , Stephen Biellak , Mous Tatarkhanov
CPC classification number: G01T1/24 , G01N21/9501
Abstract: An inspection system with radiation-induced false count mitigation includes a radiation count controller coupled to one or more radiation sensors positioned proximate to an illumination sensor oriented to detect illumination from a sample. The radiation count controller may identify a set of radiation detection events based on radiation signals received from the radiation sensors during operation of the illumination sensor. The inspection system may further include an inspection controller to identify a set of illumination detection events based on an illumination signal, identify one or more features on the sample based on the set of illumination detection events, receive the set of radiation detection events from the radiation count controller, compare the set of radiation detection events to the set of illumination detection events to identify a set of coincidence events, and refine the one or more identified features on the sample based on the set of coincidence events.
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