公开(公告)号：US20180356623A1

公开(公告)日：2018-12-13

申请号：US16056860

申请日：2018-08-07

Applicant: KLA-Tencor Corporation

Inventor： James Jianguo Xu ,  Ken Kinsun Lee ,  Rusmin Kudinar ,  Ronny Soetaman ,  Hung Phi Nguyen ,  Zhen Hou

IPC: G02B21/06 ,  G02B21/00 ,  G02B21/36

CPC classification number: G02B21/06 ,  G02B21/0092 ,  G02B21/367

Abstract: A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).