公开(公告)号：US11204330B1

公开(公告)日：2021-12-21

申请号：US14788700

申请日：2015-06-30

Applicant: KLA-Tencor Technologies Corporation

Inventor： Mehdi Vaez-Iravani ,  Eliezer Rosengaus

IPC: G01N21/00 ,  G01N21/88

Abstract: Systems and methods for inspection of a specimen are provided. One system includes an illumination subsystem configured to illuminate the specimen by scanning a spot across the specimen. The system also includes a non-imaging detection subsystem configured to generate output signals responsive to light specularly reflected from the spot scanned across the specimen. In addition, the system includes a processor configured to generate images of the specimen using the output signals and to detect defects on the specimen using the images. In one embodiment, the non-imaging detection subsystem includes an objective and a detector. An NA of the objective does not match a pixel size of the detector. In another embodiment, the non-imaging detection subsystem includes an objective having an NA of greater than about 0.05. The system may be configured for multi-spot illumination and multi-channel detection. Alternatively, the system may be configured for single spot illumination and multi-channel detection.