公开(公告)号：US20240077347A1

公开(公告)日：2024-03-07

申请号：US18272660

申请日：2022-01-20

Applicant: KOA CORPORATION

Inventor： Yasuyuki KATASE ,  Toshiya YASUE

IPC: G01F1/69 ,  G01F1/696

CPC classification number: G01F1/69 ,  G01F1/6965

Abstract: An object is to provide a sensor device capable of highly accurately detecting a flow rate at 360 degrees in a radial direction with respect to a first sensor element including a resistive element for flow rate detection. A sensor device according to the present invention includes a substrate, a first sensor element including a resistive element for flow rate detection, and a second sensor element including a resistive element for temperature compensation. Each of the first sensor element and the second sensor element is supported to be separated from a surface of the substrate via a pair of lead wires, and the first sensor element is disposed at a higher position than the second sensor element.