Gas sensor array having shared field effect transistor

    公开(公告)号:US11921080B2

    公开(公告)日:2024-03-05

    申请号:US17139517

    申请日:2020-12-31

    IPC分类号: G01N27/414

    CPC分类号: G01N27/4141

    摘要: The gas sensor according to an exemplary embodiment of the present invention comprises: an FET device including one or more gate electrodes; a sensor array part including a plurality of sensors, in which a first electrode of each sensor is connected to at least one gate electrode of the plurality of gate electrodes in the FET device; and a controller detecting a gas using a current between a drain-source in response to voltage changes in the gate electrode of the FET device, wherein each sensor includes: a first electrode connected to a gate electrode of the FET device; a second electrode receiving an operating voltage through a switch controlled by the controller; and a detection film interposed between the first electrode and the second electrode.