公开(公告)号：US20190153585A1

公开(公告)日：2019-05-23

申请号：US15511240

申请日：2015-09-14

Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

Inventor： Ho Nyun LEE ,  Hyun Jong KIM

IPC: C23C14/08 ,  C23C14/14 ,  C23C14/58 ,  C23C14/24

Abstract: Disclosed is a metal or metal oxide porous thin film having a three-dimensional open-network structure, which is used for a gas sensor, a biosensor, a battery-capacitor, a fuel cell, a solar cell, a chemical catalyst, an antibacterial filter, etc., and, more particularly, to a metal or metal oxide porous thin film having a three-dimensional open-network structure, which is manufactured through a dry process instead of a wet process and has mesopores, and a method for manufacturing the same.