公开(公告)号：US20170368526A1

公开(公告)日：2017-12-28

申请号：US15407977

申请日：2017-01-17

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Sun CHOI ,  Chan Hyuk PARK ,  Young Haeng LEE

IPC: B01J19/00 ,  B41J2/16

Abstract: Provided is a fabrication method of print head of MCM device formed micro patterned air gap capable of picoliter-scale droplet printing, and more particularly, is characterized in that comprising preparing silicon wafer 10 washed by piranha solution at step A, stacking silicon nitride films 20 and 20′ up front surface and back surface of prepared silicon wafer at step B, drying after applying photoresists 30 and 30′ to top surface and bottom surface of the silicon nitride film 20 and 20′ at step C, removing partially the photoresists through pre-determined pattern by irradiation of ultraviolet after arranging photomask 40 formed through pre-determined pattern in any one side of the photoresists 30 and 30′ at step D, forming sample droplet storage space opening by removing silicon nitride film 21 contacted to photoresists removed by pre-determined pattern at step E, removing the photoresists 30 and 30′ stacked up the silicon nitride film 20 and 20′ at step F, forming sample droplet storage space 50 by etching the silicon wafer at step G, and forming sample droplet opening 60 by irradiating ultrasonic waves at step H.

公开(公告)号：US20180086653A1

公开(公告)日：2018-03-29

申请号：US15377319

申请日：2016-12-13

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Chan Hyuk PARK ,  Yeong Mi JEONG ,  Sang Hyup LEE ,  Jae Woo CHOI ,  Yong Su CHOI

IPC: C02F3/28 ,  C02F3/06 ,  C02F1/20 ,  C02F3/12 ,  C02F3/20 ,  B01D71/02

CPC classification number: C02F3/2853 ,  B01D61/14 ,  B01D67/0041 ,  B01D69/02 ,  B01D69/046 ,  B01D71/025 ,  B01D71/027 ,  B01D2311/263 ,  B01D2315/06 ,  B01D2323/12 ,  B01D2325/24 ,  C02F1/20 ,  C02F3/06 ,  C02F3/1273 ,  C02F3/201 ,  C02F3/2893 ,  C02F2101/16 ,  C02F2101/32 ,  C02F2209/03 ,  C02F2209/04 ,  C02F2209/06 ,  C02F2209/22 ,  C02F2209/42 ,  Y02E50/343 ,  Y02W10/15

Abstract: The present invention relates to water treatment process using pyrophylite ceramic membrane which purifies contaminant from wastewater by applying the pyrophylite ceramic membrane with immersion type, more particularly, in the water treatment process using the pyrophylite ceramic membrane including pyrophylite with 80 weight and alumina with 20 weight, characterized that comprises a S-1 step which pyrophylite ceramic membrane 10 is embedded and raw water is supplied to a reactor 100 blocked from outside, a S-2 step which obtains permenate water by operating suction pump 130 connected with the pyrophylite ceramic membrane 10, a S-3 step which recovers gas generated from the reactor 100 and a S-4 step which circulates part of gas generated from the reactor 100 to the reactor 100.