公开(公告)号：US20190157481A1

公开(公告)日：2019-05-23

申请号：US16111805

申请日：2018-08-24

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Doh-Kwon LEE ,  Jangmi Lee ,  Inho Kim ,  Jeung-hyun Jeong

IPC: H01L31/0463 ,  H01L31/0224 ,  H01L31/18 ,  G03F7/20

Abstract: According to an aspect of the present invention, there is provided a method of manufacturing a compound thin film, which includes configuring an electrodeposition circuit by connecting an electrolytic solution, which is manufactured by mixing a predetermined precursor with a solvent, and an electrochemical cell, which includes a working electrode in a form of an electrode at which a specific pattern is patterned on a predetermined substrate, to a voltage application device or a current application device, and applying a reduction voltage or current to the working electrode using the voltage application device or the current application device, and selectively electrodepositing a thin film in some region of the electrode along a shape of the electrode at which the specific pattern is patterned.

公开(公告)号：US11031517B2

公开(公告)日：2021-06-08

申请号：US16111805

申请日：2018-08-24

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Doh-Kwon Lee ,  Jangmi Lee ,  Inho Kim ,  Jeung-hyun Jeong

IPC: H01L31/0463 ,  G03F7/20 ,  H01L31/18 ,  H01L31/0224 ,  H01L31/0445 ,  H01L31/032

Abstract: According to an aspect of the present invention, there is provided a method of manufacturing a compound thin film, which includes configuring an electrodeposition circuit by connecting an electrolytic solution, which is manufactured by mixing a predetermined precursor with a solvent, and an electrochemical cell, which includes a working electrode in a form of an electrode at which a specific pattern is patterned on a predetermined substrate, to a voltage application device or a current application device, and applying a reduction voltage or current to the working electrode using the voltage application device or the current application device, and selectively electrodepositing a thin film in some region of the electrode along a shape of the electrode at which the specific pattern is patterned.