Physically contactable graphene electro-optic modulator and method for manufacturing the same

    公开(公告)号:US10481419B1

    公开(公告)日:2019-11-19

    申请号:US16249900

    申请日:2019-01-17

    Abstract: Embodiments are directed to a method for manufacturing a graphene electro-optic modulator, which is freely attachable to and detachable from an optical waveguide and modulates a light according to an electric signal. The method includes: forming two metal electrodes on an oxide film formed on a substrate, the two metal electrodes being spaced apart from each other; synthesizing a first graphene film at a metal foil; coating the first graphene film with a polymer membrane; removing the metal foil at which the first graphene film is synthesized; and transferring the first graphene film coated with the polymer membrane onto the oxide film, wherein the first graphene film is electrically connected to any one of the two metal electrodes. There is also provided a graphene electro-optic modulator manufactured by the method.

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