公开(公告)号：US20140116936A1

公开(公告)日：2014-05-01

申请号：US13973013

申请日：2013-08-22

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Seong Jin KIM ,  Myoung Woon MOON ,  Kwang Ryeol LEE ,  Won Kyung SEONG ,  Wei DAI

IPC: B01D69/02 ,  B01D67/00

CPC classification number: B01D69/02 ,  B01D67/0072 ,  B01D71/021 ,  B01D2325/38 ,  B82Y40/00

Abstract: The manufacturing method of nano porous material according to an example of the present invention comprises: a preparing step to prepare a substrate; and a manufacturing step to prepare nano porous material with a network structure in which nanoclusters are connected to each other using plasma deposition through over 300 mTorr of working pressure. Using the manufacturing method, it is possible to form a nano porous material having desired surface energy without formation of additional coating layer as well as pores distributed both within and on the surface of the nano porous material with only one deposition process.

Abstract translation: 根据本发明实施例的纳米多孔材料的制造方法包括：准备基材的制备步骤; 以及制备具有网络结构的纳米多孔材料的制造步骤，其中纳米团簇通过超过300mTorr的工作压力的等离子体沉积彼此连接。 使用该制造方法，可以形成具有所需表面能的纳米多孔材料，而不形成另外的涂层以及仅在一个沉积工艺上分布在纳米多孔材料的表面内和表面上的孔。