专利检索 ap:("KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE") AND inv:"Taegun Kim" 第 1 页

1.

发明授权
Method for calibrating nano measurement scale and standard material used therein 有权

公开(公告)号：US11852581B2

公开(公告)日：2023-12-26

申请号：US17338539

申请日：2021-06-03

申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

发明人： Kyung Joong Kim , Gyea Young Kwak , Taegun Kim , Hyungung Yu , Seung Mi Lee

IPC分类号： G01N21/27 , G01Q40/02 , B82Y35/00 , G01Q60/24 , H01J37/28

CPC分类号： G01N21/274 , G01Q40/02 , B82Y35/00 , G01Q60/24 , H01J37/28

摘要： Provided is a method of calibrating a nano measurement scale using a standard material including: measuring widths of a plurality of nanostructures included in the standard material and having pre-designated certified values of different sizes by a microscope; determining measured values for the widths of each of the plurality of nanostructures measured by the microscope based on a predetermined criterion; and calibrating a measurement scale of the microscope based on the certified values and the measured values.