公开(公告)号：US20250136515A1

公开(公告)日：2025-05-01

申请号：US18888637

申请日：2024-09-18

Applicant: KSM COMPONENT CO., LTD.

Inventor： Yun Ho KIM ,  Joo Hwan KIM ,  Hwan Young PARK ,  Bo Sung KIM ,  Hyun Taek LEE

IPC: C04B35/103 ,  C04B35/638 ,  C04B35/64 ,  H01L21/687

Abstract: A ceramic susceptor particularly with excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to a typical ceramic susceptor and a method for manufacturing the same are disclosed. The ceramic susceptor is characterized by comprising alumina (Al2O3); and aluminum nitride (AlN), and not comprising a secondary phase including an aluminum oxynitride phase (AlON phase).