公开(公告)号：US20210246542A1

公开(公告)日：2021-08-12

申请号：US17285015

申请日：2019-04-23

申请人： KVARC SERVICES INC

发明人： Leonid KRISHTEIN ,  Vladimir ANISIMOV ,  Oleg POPOV

IPC分类号： C23C14/32 ,  C23C14/35 ,  H01J37/32 ,  C23C14/14 ,  C23C14/54

摘要： A cathode arc evaporator of metals and alloys for coating in a vacuum chamber, including an ignition device adapted for initiating an arc discharge, at least one anode, a water-cooled, consumable tubular cathode arranged along a longitudinal axis and rotatable thereabout, an electromagnetic system disposed within the cathode and adapted for forming an arch-like magnetic field, formed by at least one electromagnetic coil, in the vicinity of a surface of the cathode, resulting in a displaceable cathode spot, which is steerable by the magnetic field, at least one sensor responsive to the proximity of the cathode spot, and a controller which is configured to switch the polarity of the current of the at least one electromagnetic coil in response to the signals received from the at least one sensor.